Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Debra-Ann Klug"'
Autor:
C. Michael Greenlief, Debra-Ann Klug
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 14:1826-1831
The adsorption and decomposition of ethylbromide on the Si(100) and Si(111) surfaces is investigated. Ethylbromide adsorbs molecularly on Si at surface temperatures below 110 K. Warming the ethylbromide‐covered surface above 200 K results in the cl
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 11:2067-2072
The adsorption and decomposition of digermane, Ge2H6, on the Si(100)‐(2×1) surface has been investigated with the intent of elucidating the surface processes leading to the deposition of epitaxial Ge thin films from gaseous Ge‐containing sources
Publikováno v:
Chemical Physics Letters. 197:352-357
The low-temperature adsorption and decomposition of digermane on Si(100) has been investigated by ultraviolet photoelectron spectroscopy. Exposure of Ge 2 H 6 to Si(100) at 110 K results in molecular adsorption and ab initio calculations of gas phase
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 10:2465-2469
The adsorption and decomposition of germane GeH4 and digermane Ge2H6 on Si(100) have been investigated. Exposure of GeH4 to Si(100) at 110 K results in dissociative chemisorption to GeH3 and H. The adsorption of GeH4 is via a precursor state. Heating
Publikováno v:
MRS Proceedings. 282
The adsorption and decomposition of several Ge-containing compounds on Si(100) have been investigated with the intent of elucidating the surface processes leading to the deposition of epitaxial Ge films from these gaseous sources. Exposure of digerma
Conference
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