Scanning Acoustic Microscopy of Annealing Effects for Aluminium Thin Film Deposited on Silicon Substrate.

Autor: Atailia, Chafia, Deboub, Lakhdar, Boudour, Amar, Boumaiza, Youcef

Publikováno v: Metallophysics & Advanced Technologies / Metallofizika i Novejsie Tehnologii; Oct2018, Vol. 40 Issue 10, p1387-1399, 13p