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pro vyhledávání: '"Debbora Ahlgren"'
Autor:
Michael Wong, Neel Leslie, Or Haimson, Oleg Sidorov, David Tien, Roy Goldman, Debbora Ahlgren, David Donnet
Publikováno v:
International Symposium for Testing and Failure Analysis.
In a previous study, the authors introduced a novel technique of using low-beam energy Gallium Focused Ion Beam to expose a large area of Shallow Trench Isolation (STI) over a Dynamic Ring Oscillator (DRO) incurring virtually no change of its operati
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3e8a8cc9f1038a399d6dc0c43d9e0170
https://doi.org/10.31399/asm.cp.istfa2020p0305
https://doi.org/10.31399/asm.cp.istfa2020p0305
