Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Deanna Soucie"'
Autor:
Koichi Miyauchi, Deanna Soucie, Robert L. Brainard, William Earley, Brian Cardineau, Arata Takahashi, Takashi Aoki, Kenji Hosoi
Publikováno v:
Journal of Photopolymer Science and Technology. 30:351-359
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::54b01c3b969f9870964a4975458f7436
https://doi.org/10.2494/photopolymer.30.351
https://doi.org/10.2494/photopolymer.30.351
Autor:
Takashi Aoki, Koichi Miyauchi, Brian Cardineau, Jay Chun, Arata Takahashi, Robert L. Brainard, Michael O’Sullivan, William Earley, Kenji Hosoi, Deanna Soucie
Publikováno v:
SPIE Proceedings.
The synthesis and lithographic evaluation of 193-nm and EUV photoresists that utilize a higher-order reaction mechanism of deprotection is presented. Unique polymers utilize novel blocking groups that require two acid-catalyzed steps to be removed. W
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ca974332cff3c78a3e4a9166af5c4edb
https://doi.org/10.1117/12.2258324
https://doi.org/10.1117/12.2258324