Zobrazeno 1 - 10
of 19
pro vyhledávání: '"Dean V. Wiberg"'
Autor:
Dean V. Wiberg, Eui-Hyeok Yang
Publikováno v:
Journal of Microelectromechanical Systems. 12:804-815
This paper describes a new fabrication technique developed for the construction of large area mirror membranes via the transfer of wafer-scale continuous membranes from one substrate to another. Using this technique, wafer-scale silicon mirror membra
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::c7b67b41c15a54ddb586635305b0fdfa
https://doi.org/10.1109/jmems.2003.818454
https://doi.org/10.1109/jmems.2003.818454
Autor:
Thomas W. Kenny, Keith H. Jackson, T. D. Stowe, M. L. Scholz, Dean V. Wiberg, Michael H. Hecht, Steven Manion, Chantal G. Khan Malek, William D. Bonivert, R. A. Brennen, Jill M. Hruby
Publikováno v:
Microsystem Technologies. 3:91-96
We are fabricating sub-collimating X-ray grids that are to be used in an orbiting solar X-ray telescope. The telescope optics consist of twelve rotating pairs of high aspect ratio grids. The pitch for the grids ranges from 34 μm to 317 μm. The grid
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::443671e9a42ec104503d94ed14268f0e
https://doi.org/10.1007/s005420050062
https://doi.org/10.1007/s005420050062
Autor:
Dean V. Wiberg, Tara Estlin, Andrew D. Aubrey, Issa A. D. Nesnas, Khaled Ali, Jeffery L. Hall, Aaron Parness, Hari Nayar
Publikováno v:
All Days.
Abstract The Jet Propulsion Laboratory (JPL) routinely operates robotic spacecraftmillions of miles from the Earth. Current JPL missions include roving on Marsand observing the Sun, Earth, Saturn, comets and asteroids and deep space. Advances in high
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::caf8f92959ddac177960afdec2dd52b0
https://doi.org/10.4043/22989-ms
https://doi.org/10.4043/22989-ms
Autor:
Philip Munz, Beverley Eyre, Kirill Shcheglov, Dean V. Wiberg, Otto J. Orient, Eric J. Moore, Nosang V. Myung
Publikováno v:
SPIE Proceedings.
A 3X3 array of hyperboloid quadrupole mass filters with a 3 mm pole length was fabricated using the LIGA (LI thographic G alvanoformung and A bformung) process. Electrical connectivity and spatial orientation are established by bonding the pole array
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ea0634f90b096f1aba42738d184c63cb
https://doi.org/10.1117/12.520540
https://doi.org/10.1117/12.520540
Autor:
Nosang V. Myung, Eric J. Moore, Francis Erye, Kirill Shcheglov, Otto J. Orient, E. Phillip Muntz, Dean V. Wiberg
Publikováno v:
AIP Conference Proceedings.
The scroll pump is an interesting positive displacement pump. One scroll in the form of an Archimedes spiral moves with respect to another, similarly shaped stationary scroll, forming a peristaltic pumping action. The moving scroll traces an orbital
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2385d3e3840cb0798fda7e5c4783ac2e
https://doi.org/10.1063/1.1581653
https://doi.org/10.1063/1.1581653
Publikováno v:
Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176).
Using the Taguchi technique an optimization experiment was performed to characterize the processing of Epon SU-8 negative photoresist. This photoresist has proven to be very sensitive to process variations and difficult to use. The Taguchi method rev
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::60677349179e1bef9f361c8bec3890bc
https://doi.org/10.1109/memsys.1998.659757
https://doi.org/10.1109/memsys.1998.659757
Autor:
Dean V. Wiberg, Eui-Hyeok Yang
Publikováno v:
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090).
This paper describes a new technique for transferring an entire wafer-level silicon membrane from one substrate to another. A 1 /spl mu/m thick silicon membrane, 100 mm in diameter, has been successfully transferred without using adhesives or polymer
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::729de8504ae758a1c5cb6ece64e4afed
https://doi.org/10.1109/memsys.2001.906483
https://doi.org/10.1109/memsys.2001.906483
Publikováno v:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2002.
This paper reports on JPL's on-going research into MEMS gyroscopes. This paper will describe the gyroscope's fabrication-methods, a new 8-electrode layout developed to improve performance, and performance statistics of a batch of six gyroscopes recen
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::06ead8c6ff79c9719fb3b7558c932905
https://doi.org/10.1117/12.462826
https://doi.org/10.1117/12.462826
Autor:
Dean V. Wiberg, Eui-Hyeok Yang
Publikováno v:
Micro-Electro-Mechanical Systems (MEMS).
Adaptive optics systems require the combination of several advanced technologies such as precision optics, wavefront sensors, deformable mirrors and lasers with highspeed control systems. The deformable mirror with a continuous membrane is a key comp
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::44e177151ff8a9b674c05db1c036b0e0
https://doi.org/10.1115/imece2001/mems-23807
https://doi.org/10.1115/imece2001/mems-23807
Publikováno v:
SPIE Proceedings.
A novel Microelectromechanical Systems (MEMS) deformable mirror technology for large, lightweight, segmented space telescopes is being proposed.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::450d6c88700defbfe1b40f51d0d6a538
https://doi.org/10.1117/12.405766
https://doi.org/10.1117/12.405766