MEMS Reliability: On-Chip Testing for the Characterization of the Out-of-Plane Polysilicon Strength.

Autor: Vicentini Ferreira do Valle T; Department of Civil and Environmental Engineering, Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milano, Italy., Mariani S; Department of Civil and Environmental Engineering, Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milano, Italy., Ghisi A; Department of Civil and Environmental Engineering, Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milano, Italy., De Masi B; Department of Civil and Environmental Engineering, Politecnico di Milano, Piazza Leonardo da Vinci 32, 20133 Milano, Italy., Rizzini F; STMicroelectronics, via Tolomeo 1, 20010 Cornaredo, Italy., Gattere G; STMicroelectronics, via Tolomeo 1, 20010 Cornaredo, Italy., Valzasina C; STMicroelectronics, via Tolomeo 1, 20010 Cornaredo, Italy.

Publikováno v: Micromachines [Micromachines (Basel)] 2023 Feb 13; Vol. 14 (2). Date of Electronic Publication: 2023 Feb 13.

Simultaneous Micromechanical and Electromagnetic Detection of Electron Paramagnetic Resonance

Autor: Alzetta, G., Ascoli, C., Baschieri, P., Bertolini, D., Betti, I., De Masi, B., Frediani, C., Lenci, L., Martinelli, M., Scalari, G.

Publikováno v: In Journal of Magnetic Resonance November 1999 141(1):148-158

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Polysilicon fatigue test-bed monitoring based on the 2nd harmonic of the device current measurement.

Autor: Ferraris, E., Fassi, I., De Masi, B., Sarto, M.D.

Publikováno v: 2005 International Conference on MEMS,NANO & Smart Systems; 2005, p55-60, 6p

MEMS force microactuator with displacement sensing for mechanobiology experiments.

Autor: Cerini, F., Ferrari, M., Ferrari, V., Russo, A., Urquia, M. Azpeitia, Ardito, R., De Masi, B., Serzanti, M., Dell'Era, P.

Publikováno v: 2015 AEIT International Annual Conference (AEIT); 1/1/2015, p1-6, 6p