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pro vyhledávání: '"David von Bergen"'
Autor:
Andreas Schels, Andreas Pahlke, Manuel Meyer, Josef Biba, Felix Düsberg, Simon Edler, David von Bergen, Marinus Werber, Walter Hansch, Christoph Langer, Michael Bachmann
Publikováno v:
Journal of Vacuum Science & Technology B. 39:027001
Autor:
Manuel Meyer, David von Bergen, Marinus Werber, Andreas Schels, Felix Düsberg, Simon Edler, Walter Hansch, Andreas Pahlke, Christoph Langer, Josef Biba, Michael Bachmann
Publikováno v:
Journal of Vacuum Science & Technology B. 39:013205
Silicon field emitter arrays (FEAs) with different tip sizes and quantities were fabricated by saw dicing and anisotropic wet chemical etching by tetramethylammonium hydroxide. The tip is formed by the different etching rates of the crystal facets le