Zobrazeno 1 - 2
of 2
pro vyhledávání: '"David Winfield Woodruff"'
Publikováno v:
Surface and Coatings Technology. 49:215-220
A method is described whereby fine-grained equiaxed tungsten films can be deposited by chemical vapor deposition (CVD). Special techniques are required to obtain the equiaxed grain structure and are generally not known. The method described here cons
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::110ba478d0e6991f4cb251ce2bc63d35
https://doi.org/10.1016/0257-8972(91)90058-5
https://doi.org/10.1016/0257-8972(91)90058-5
Publikováno v:
Journal of The Electrochemical Society. 132:706-708
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::230f7bf3d1a769db995cb3c221acddf3
https://doi.org/10.1149/1.2113936
https://doi.org/10.1149/1.2113936