Zobrazeno 1 - 10
of 17
pro vyhledávání: '"David Shykind"'
Autor:
Glenn H. Fredrickson, Karl K. Berggren, Corinne Carpenter, Patrick Theofanis, Samuel M. Nicaise, Kris T. Delaney, David Shykind
Publikováno v:
Macromolecules. 50:8258-8266
We present a combination of self-consistent field theory simulations and experimental results to explore the mechanism behind the orientational preference of second-layer cylinders in nanomeshes formed by two consecutive steps of the self-assembly of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::45eaa209f042773ca7f1c7c8c8821546
https://doi.org/10.1021/acs.macromol.7b01290
https://doi.org/10.1021/acs.macromol.7b01290
Publikováno v:
Macromolecules. 47:8819-8823
The directed self-assembly (DSA) of block copolymers offers an attractive route to produce one-dimensional rows of cylindrical ∼10 nm scale contact holes for lithography. The success of DSA as a viable lithography technique hinges however on the ab
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::94f31ca08bf13c1ecf1455527fbf30f5
https://doi.org/10.1021/ma501679a
https://doi.org/10.1021/ma501679a
Autor:
Kris T. Delaney, Corey J. Weinheimer, Nabil Laachi, Tatsuhiro Iwama, Glenn H. Fredrickson, David Shykind
Publikováno v:
Journal of Polymer Science Part B: Polymer Physics. 53:317-326
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ae173cc305b15df3a39b4481f3a7b6c9
https://doi.org/10.1002/polb.23630
https://doi.org/10.1002/polb.23630
Autor:
Glenn H. Fredrickson, Corey J. Weinheimer, Kris T. Delaney, Robert L. Bristol, David Shykind, Tatsuhiro Iwama, Nabil Laachi
Publikováno v:
ResearcherID
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::896562b4a18df0b6f0cad71f99b6178b
https://doi.org/10.2494/photopolymer.27.21
https://doi.org/10.2494/photopolymer.27.21
Autor:
David Shykind, Kris T. Delaney, Bongkeun Kim, Curey J. Weinheimer, Glenn H. Fredrickson, Tatsuhiro Iwama, Nabil Laachi, Robert L. Bristol, Sun-MI Hur
Publikováno v:
Journal of Photopolymer Science and Technology. 26:15-20
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ececa63e90c923ff97f74f8008424d8f
https://doi.org/10.2494/photopolymer.26.15
https://doi.org/10.2494/photopolymer.26.15
Autor:
Hassei Takahashi, Glenn H. Fredrickson, Su-Mi Hur, Kris T. Delaney, Corey J. Weinheimer, David Shykind, Nabil Laachi
Publikováno v:
Macromolecules. 45:6253-6265
We use self-consistent field theory (SCFT) to study the directed self-assembly of laterally confined diblock copolymers. In this study, we focus on systems in which the self-assembled lamellae are oriented parallel to selective sidewalls in a channel
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7f656a5118e98837126b64320ba5cc78
https://doi.org/10.1021/ma300993x
https://doi.org/10.1021/ma300993x
Autor:
Nabil Laachi, Tatsuhiro Iwama, Robert L. Bristol, Glenn H. Fredrickson, Bongkeun Kim, David Shykind, Corey J. Weinheimer, Kris T. Delaney
Publikováno v:
SPIE Proceedings.
We have investigated the directed self-assembly (DSA) of cylinder-forming block copolymers inside cylindrical guiding templates. To complement and corroborate our experimental study, we use field-theoretic simulations to examine the fluctuations-indu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::590cb8a057569b3b3fa9fc43d6b064f2
https://doi.org/10.1117/12.2046472
https://doi.org/10.1117/12.2046472
Autor:
Robert L. Bristol, Glenn H. Fredrickson, Bongkeun Kim, Su-Mi Hur, Corey J. Weinheimer, David Shykind, Kris T. Delaney, Nabil Laachi
Publikováno v:
Alternative Lithographic Technologies V.
We use self-consistent field theory (SCFT) to study the self-assembly of cylinder-forming diblock copolymers confined in a cylindrical prepattern. This situation arises in contact holes -the hole shrink problem- where the goal is to produce a cylindr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::104f26ab53eda9ed9fccbf029650fbcb
https://doi.org/10.1117/12.2011198
https://doi.org/10.1117/12.2011198
Autor:
Glenn H. Fredrickson, Hassei Takahashi, Su-Mi Hur, Corey J. Weinheimer, David Shykind, Nabil Laachi
Publikováno v:
Alternative Lithographic Technologies IV.
Theoretical methods are critical to our understanding of defect formation in block copolymer lithography processes. We have previously applied self-consistent field theory (SCFT) to study the energetics of dislocation and disclination defects prevale
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8fd55ab441d5781d401ac3add3087c9b
https://doi.org/10.1117/12.916578
https://doi.org/10.1117/12.916578
Autor:
Su-Mi Hur, Glenn H. Fredrickson, Nabil Laachi, Corey J. Weinheimer, Hassei Takahashi, Kris T. Delaney, David Shykind
Publikováno v:
Alternative Lithographic Technologies IV.
We use Self-Consistent Field Theory (SCFT) to study the directed self-assembly of laterally confined diblock copolymers. In this study, we focus on systems where the self-assembled lamellae are oriented parallel to the selective sidewalls of the chan
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7bfad70b222addcab8b6311ecbf043df
https://doi.org/10.1117/12.916577
https://doi.org/10.1117/12.916577