Zobrazeno 1 - 10
of 21
pro vyhledávání: '"David P. Gaines"'
Publikováno v:
First International Meeting for Applied Geoscience & Energy Expanded Abstracts.
Publikováno v:
82nd EAGE Annual Conference & Exhibition.
Summary One long-standing challenge in land seismic processing is accurate modeling and attenuation of aliased surface waves, which distort signals from deeper structures and lead to poor S/N. We propose a method based on elastic full waveform invers
Publikováno v:
SEG Technical Program Expanded Abstracts 2020.
Publikováno v:
Optics letters. 13(2)
We report the first demonstration to our knowledge of multipass amplification of soft x rays. A gain medium of neonlike selenium ions was placed within a resonant cavity composed of a multilayer mirror and a beam splitter designed for normal-incidenc
Publikováno v:
Grazing Incidence and Multilayer X-Ray Optical Systems.
The first measurements are reported of non-specular scattering of EUV radiation normally incident on a multilayer mirror. The scattering from a Mo/Si multilayer mirror has been measured as a function of angle and wavelength. A peak in the angular dis
Publikováno v:
Extreme Ultraviolet Lithography.
A three-element Köhler condenser system has been fabricated, characterized, and integrated into an EUV lithographic system. The multilayer coatings deposited on the optics were designed to provide optimal radiation transport efficiency and illuminat
Publikováno v:
Extreme Ultraviolet Lithography.
A four-bounce two-element projection system designed to achieve 0.14 μm resolution over a 1.2x5 mm2 ring field has been fabricated. The radiation transport properties of both the individual multilayer-coated optics and the assembled system has been
Autor:
Natale M. Ceglio, Peter Mueller, Michael Krumrey, R.S. Rosen, Stephen P. Vernon, Daniel G. Stearns, David P. Gaines
Publikováno v:
SPIE Proceedings.
Soft x-ray projection lithography (SXPL) requires uniform, high reflectivity multilayer (ML) coatings on figured optical surfaces with lens speeds (f) between 3 and 6 and diameters of 10 to 15 cm. High reflectivity Mo-Si ML coatings for operation nea
Publikováno v:
Soft-X-Ray Projection Lithography.
Soft-x-ray projection lithography (SXPL) will use a reflective mask consisting of an x-ray multilayer mirror, patterned with a thin (~50-100 nm) layer of gold. Pattern repair techniques that do not degrade the multilayer mirror reflectivity must be d
Publikováno v:
SPIE Proceedings.
Fabrication and environmental damage issues may require that the multilayer x-ray reflection coatings used in soft x-ray projection lithography be replaced or repaired. Two repair strategies were investigated. The first was to overcoat defective mult