Zobrazeno 1 - 10
of 11
pro vyhledávání: '"David Onsongo"'
Publikováno v:
Solid-State Electronics. 48:2299-2306
P-channel metal-oxide-semiconductor field-effect-transistors (PMOSFETs) with a Si 1− x Ge x /Si heterostructure channel were fabricated. Peak mobility enhancement of about 41% in Si 1− x Ge x channel PMOSFETs was observed compared to Si channel P
Publikováno v:
Applied Surface Science. 224:248-253
We report that drive current enhancement and higher mobilities than the universal mobility in compressively strained Si1−xGex on Si surface-channel p-type metal-oxide–semiconductor field-effect-transistors (PMOSFETs) with HfO2 gate dielectric, fo
Publikováno v:
Solid-State Electronics. 48:379-387
Si1−yCy alloy layers deposited on (1 0 0) Si form a tensile-strained layer, similar to strained-Si on a relaxed SiGe buffer. We present the results of fabrication of heterojunction metal oxide semiconductor field effect transistor (MOSFET) devices
Publikováno v:
Journal of Electronic Materials. 32:184-190
A nickel silicide process for Si1-xGex, Si1-x-yGexCy, and Si1-yCy alloy materials compatible with Si technology has been developed. Low-resistivity-phase (12–20 µΘ cm) nickel silicides have been obtained for these alloys with different low sheet-
Publikováno v:
Solid-State Electronics. 44:1223-1228
Deep submicron (0.35 μm) strained Si1−xGex buried channel p-MOSFETs with a Ge concentration up to 50% were simulated using the MEDICI device simulator. A buried channel structure offers several benefits over a surface channel structure without a S
Publikováno v:
IEEE Electron Device Letters. 24:34-36
We report for the first time drive current enhancement and higher mobilities than the universal mobility for SiO/sub 2/ on Si in compressively strained Si/sub 1-x/Ge/sub x/-on-Si surface channel PMOSFETs with HfO/sub 2/ gate dielectrics, for gate len
Autor:
Sanjay K. Banerjee, Q. Ouyang, S.K. Jayanarayanan, Xiangdong Chen, Al F. Tasch, David Onsongo
Publikováno v:
Applied Physics Letters. 77:1656-1658
SiGe source heterojunction p-type metal–oxide–semiconductor field-effect transistors (p-MOSFETs) have been used before to suppress the short channel effect for sub-100 nm devices. While the leakage is reduced, the drive current is also reduced du
Publikováno v:
SPIE Proceedings.
The SiGeC ternary alloy seems to be an attractive material system for Si-based device applications, because the incorporation of a small amount of C in the high-mobility SiGe layer offers an additional degree of freedom for tuning the bandgap, band o
Autor:
Douglas J. Resnick, Grant Willson, David P. Mancini, John G. Ekerdt, Chris J. Mackay, Sidlgata V. Sreenivasan, Sanjay K. Banerjee, David Onsongo, Nicholas A. Stacey, Britain J. Smith, William J. Dauksher, Kevin J. Nordquist, J. P. Donnelly, Todd Bailey
Publikováno v:
SPIE Proceedings.
Step and Flash Imprint Lithography (SFIL) is an alternative lithography technique that enables patterning of sub-100 nm features at a cost that has the potential to be substantially lower than either conventional projection lithography or proposed ne
Publikováno v:
MRS Proceedings. 737
Dopants diffusion, activation and pile-up due to rapid thermal annealing of implanted Al and B in a thin (∼200Å) Si cap layer on top of Si1-x-yGexCy layer were studied. Experimental results show that both the lattice strain and differential diffus