Zobrazeno 1 - 6
of 6
pro vyhledávání: '"David Nijkerk"'
Autor:
A.M. Hoogstrate, R. Henselmans, Folkert Draaisma, Peter Van Doorn, David Nijkerk, Bart van Venrooy
Publikováno v:
International Conference on Space Optics — ICSO 2012.
In this paper, we discuss the two-mirror pushbroom telescope for TROPOMI. Using freeform optics, it has unprecedented resolution. The complete cycle of freeform optical design, analysis, manufacturing, metrology and functional test on a breadboard se
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::be13ef71cee74be6c9a7a07cabf21a0a
https://doi.org/10.1117/12.2309035
https://doi.org/10.1117/12.2309035
Autor:
Erwin John Van Zwet, Teun C. van den Dool, Jeroen A. Smeltink, David Nijkerk, Wouter D. Koek, Gregor van Baars
Publikováno v:
High-Power Laser Materials Processing: Applications, Diagnostics, and Systems VI.
TNO is developing a High Power Adaptive Mirror (HPAM) to be used in the CO2 laser beam path of an Extreme Ultra- Violet (EUV) light source for next-generation lithography. In this paper we report on a developed methodology, and the necessary simulati
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b2c5739e9d82e775a3a9c4ed83a292db
https://doi.org/10.1117/12.2249739
https://doi.org/10.1117/12.2249739
Publikováno v:
Adaptive Optics Systems III, 1-6 July 2012, Amsterdam, The Netherlands, 8447
TNO has developed the Optical Tube Assemblies (OTAs) for the ESO VLT Four Laser Guide Star Facility. The OTAs are Galilean 20x beam expanders, expanding a ∅15 mm input beam (25W, 589 nm CW) to a steerable ∅300 mm output beam. TNO has recently suc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::e5fe97e8560da726973e9e57aa09bf3b
https://doi.org/10.1117/12.926484
https://doi.org/10.1117/12.926484
Publikováno v:
Astronomical Adaptive Optics Systems and Applications IV, 21-24 August 2011, San Diego, CA, USA, 8149, 814905-1-814905-7
TNO is developing the Optical Tube Asssemblies (OTAs) for the ESO VLT Four Laser Guide Star Facility. The OTAs are Galilean 20x beam expanders, expanding a Ø15 mm input beam to a steerable Ø300 mm output beam with a wavefront quality requirement of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::cdb8235b626f829c940521d187ef2b21
http://resolver.tudelft.nl/uuid:7c0c03d1-5791-49db-a794-be0bf07523a9
http://resolver.tudelft.nl/uuid:7c0c03d1-5791-49db-a794-be0bf07523a9
Publikováno v:
SPIE Proceedings.
A method for actinic inspection of EUV mask blanks is described, in which EUV photoresist is applied to the blank, flood exposed with EUV, and developed. The effect of both phase and reflectivity defects on the reticle is described in terms of a vari
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5398657d6ce31e2899f950d70e0bf961
https://doi.org/10.1117/12.846505
https://doi.org/10.1117/12.846505
Autor:
Hans Gijsbertsen, Maurits van der Schaar, Stefan Carolus Jacobus Antonius Keij, Giljam Derksen, Patrick W.H. de Jager, David Nijkerk
Publikováno v:
SPIE Proceedings.
The use of backscatter electron detection in a wafer alignment system has been investigated. For certain types of wafer processing such an alignment system might show improved process robustness compared to optical sensors. This expectation is based
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::209d2650dcb6ca95f0f311d0b8f1cde8
https://doi.org/10.1117/12.484962
https://doi.org/10.1117/12.484962