Zobrazeno 1 - 10
of 10
pro vyhledávání: '"David K. Poon"'
Publikováno v:
SPIE Proceedings.
Bimetallic thin-films offer the ability of producing analog grayscale photomasks with OD ranging from ~3.0OD (unexposed) to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::06e8171b234cf6084f6c1a47a34b42c7
https://doi.org/10.1117/12.702589
https://doi.org/10.1117/12.702589
Autor:
Jimmy T. K. Tsui, Glenn H. Chapman, Chinheng Choo, Ash M. Parameswaren, James M. Dykes, Bonnie L. Gray, Dan Sameoto, Jun Wang, David K. Poon
Publikováno v:
Microfluidics, BioMEMS, and Medical Microsystems V.
Two methods were investigated for the creation of encapsulated micro-fluidic channels and bridges in negative tone SU-8 photoresist. The first uses two exposures at different wavelengths to create the channel sidewalls and microchannel encapsulation
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::55808000450df24e29edf6f33cb6c11d
https://doi.org/10.1117/12.702876
https://doi.org/10.1117/12.702876
Autor:
Marian Chang, David K. Poon, Glenn H. Chapman, Jimmy T. K. Tsui, Chinheng Choo, James M. Dykes, Jun Wang
Publikováno v:
2007 Canadian Conference on Electrical and Computer Engineering.
Metallic thin films can be fully oxidized by focused laser beams, resulting in their optical density (OD) changing from highly absorbing to very transparent. Previous research found the laser-induced partial oxidation process allows the creation of g
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b239008046c6a906ad3fdce0561e0092
https://doi.org/10.1109/ccece.2007.245
https://doi.org/10.1109/ccece.2007.245
Autor:
Yuqiang Tu, Patrick Reynolds, David K. Poon, James M. Dykes, Jimmy T. K. Tsui, Jun Wang, Chinheng Choo, Glenn H. Chapman, Andrew Zanzal
Publikováno v:
SPIE Proceedings.
Recent work has shown that bimetallic films, such as Bi/In and Sn/In, can create laser direct-write grayscale photomasks. Using a laser-induced oxidation process; bimetallic films turn transparent with variations in optical transparency that are a fu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f5021131adce8c46b1f43b20f2f69461
https://doi.org/10.1117/12.686599
https://doi.org/10.1117/12.686599
Publikováno v:
SPIE Proceedings.
Bimetallic Bi/In films demonstrate grayscale levels after exposed with different laser powers due to controlled film oxidation. Although large optical density (OD) change from 3.0 OD to 0.22 OD at 365 nm was observed, these films show a rapid and non
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e7de270a84cc7511837969526b7ab1b5
https://doi.org/10.1117/12.657067
https://doi.org/10.1117/12.657067
Publikováno v:
Photon Processing in Microelectronics and Photonics V.
DC-sputtered Sn/In and Bi/In bimetallic thin films oxidize and turn transparent under laser exposure. The film's transparency, or optical density (OD), changes smoothly with increasing laser power, from ~3.0OD (unexposed) to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7b663e4120889338aee3de2d67045974
https://doi.org/10.1117/12.647251
https://doi.org/10.1117/12.647251
Publikováno v:
Photon Processing in Microelectronics and Photonics V.
Previous research showed that bimetallic Bi/In and Sn/In films exhibit good grayscale levels after laser exposure due to controlled film oxidation. While giving a large alteration in optical density (OD) from 3.0OD to 0.22OD at 365 nm, Bi/In and Sn/I
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::53aa4486f3de8ad3e9082db8dfa3d265
https://doi.org/10.1117/12.648618
https://doi.org/10.1117/12.648618
Publikováno v:
SPIE Proceedings.
Bimetallic thin films have been proven to be effective in creating analog direct write grayscale photomasks. DC-sputtered Bi/In or Sn/In oxidizes under laser writing exposure. The optical density decreases from >3OD as deposited to a transparency of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::2adefc4258c603a1045d5c8b842977d6
https://doi.org/10.1117/12.632245
https://doi.org/10.1117/12.632245
Autor:
Jun Wang, James M. Dykes, Jun Peng, Chinheng Choo, Glenn H. Chapman, David K. Poon, Yuqiang Tu, Willy Lennard, Karen L. Kavanagh
Publikováno v:
SPIE Proceedings.
Bimetallic films have been found to be promising direct write binary and grayscale photomask materials, as they turn transparent after laser exposure. Current structural analysis shows that the laser exposure is an oxidation process. The amount of th
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4e95ebfee3fdd2a1f4b793e72f42e96b
https://doi.org/10.1117/12.600463
https://doi.org/10.1117/12.600463
Publikováno v:
SPIE Proceedings.
Bimetallic thin films were previously shown to create laser direct write binary and analog gray scale photomasks. DC-sputtered Sn/In (5at.% Sn, 80 nm) oxidize under laser exposure, modifying the optical density at 365 nm from >3OD to
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::99b92ec976e54fb178af7cebd42620b0
https://doi.org/10.1117/12.569405
https://doi.org/10.1117/12.569405