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Autor:
Soroush Khadem, Manuel Castellanos-Beltran, Peter F. Hopkins, Javier Pulecio, Paul D. Dresselhaus, John Biesecker, David I. Olaya, Samuel P. Benz, Theodore Lewitt
Publikováno v:
IEEE Transactions on Applied Superconductivity. 29:1-8
We describe our process for fabricating single-flux-quantum circuits for applications in communications metrology, advanced computing, and quantum information. The process flow includes four superconducting metal layers, one junction layer, one palla