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pro vyhledávání: '"David Hamilton Clark"'
Autor:
Steven Shannon, David Hamilton Clark, Donal O Sullivan, Michael Hopkins, Theresa Kummerer, David J. Coumou
Publikováno v:
IEEE Transactions on Plasma Science. 42:1880-1893
The energy distribution of ions accelerated through a radio frequency sheath and incident on a plasma-facing material significantly influences material interaction with the plasma and can impact manufacturing at the nanoscale. Ion energy distribution