Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Dave Kolar"'
Publikováno v:
Journal of The Electrochemical Society. 144:1849-1854
By depositing collimated titanium at near room temperature, a preferred (002) oriented Ti film is formed. These (002) Ti films showed uniform grain size distributions and a smooth surface topography. In contrast, collimated Ti using conventional depo
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::84657759c951983db99566c68602d10d
https://doi.org/10.1149/1.1837689
https://doi.org/10.1149/1.1837689
Publikováno v:
Journal of The Electrochemical Society. 142:3893-3896
A metallization stack is fabricated using a tungsten cap layer on top of the aluminum interconnect. Utilizing this stack significantly reduces the possibility of process-induced defectivity problems : formation of via veils, metal extrusions, and bre
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f5663c392b1ddd0dc7dfed310921718f
https://doi.org/10.1149/1.2048430
https://doi.org/10.1149/1.2048430
Autor:
Rajan Nagabushnam, Scott C. Bolton, Paul G. Y. Tsui, Ted R. White, H. Chuang, Dave Kolar, Larry Pulvirent, Larry E. Frisa, Mohamed Jahanbani, Jeff Cope
Publikováno v:
SPIE Proceedings.
This work compares the extendibility of titanium with pre- deposition amorphizing implant (PAI) and cobalt salicides to sub-0.25 micrometer technologies. Cobalt salicide has low sheet resistance and a tighter distribution of sheet resistances than ti
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::abc1466cd70d332ab1072cea52065f53
https://doi.org/10.1117/12.323957
https://doi.org/10.1117/12.323957
Publikováno v:
Handbook of Critical Dimension Metrology and Process Control: A Critical Review.
Pareto analysis has become one of the most important and widely used tools in solving quality problems. The usefulness of Pareto analysis extends well beyond the application to defect data being applicable to most every department in a company includ
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e22058a583028cf8a1d77233a8c5460a
https://doi.org/10.1117/12.187459
https://doi.org/10.1117/12.187459
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