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pro vyhledávání: '"Dave Czaplewski"'
Autor:
Dave Czaplewski, Gilbert L. Benavides, Paul C. Galambos, Bernie Jokiel, Kenneth R. Pohl, David L. Luck, Rick Givler
Publikováno v:
Sensors and Actuators A: Physical. 141:182-191
A novel electrostatic sideways actuation drop dispenser (a sideshooter) is presented. The polysilicon Micro-Electro-Mechanical System (MEMS) drop dispenser is surface micromachined using the SUMMiT™ fabrication process. The dispenser was used to ej
Autor:
Dave Czaplewski, Bojan Ilic, Douglas M. Photiadis, Joseph F. Vignola, Harry J. Simpson, Lidija Sekaric, Martin H. Marcus, Brian H. Houston, Xiao Liu, James E. Butler, Jacek Jarzynski
Publikováno v:
SPIE Proceedings.
Micro electro-mechanical systems (MEMS) devices are being developed for a broad range of applications. In most cases, the sensitivity of the final device is a function of the intrinsic dissipation of mechanical energy, or Q-1. We use laser Doppler vi
Autor:
A. Olkhovets, Dave Czaplewski, Stephen Turner, Harold G. Craighead, Maxim Zalalutdinov, Lidija Sekaric, Jeevak M. Parpia, Alan T. Zehnder, Bojan Ilic
Publikováno v:
SPIE Proceedings.
High-frequency microoptoelectromechanical systems (MOEMS) are proposed as active devices for radio frequency signal processing. Parametric amplification (PA), generation, frequency modulation and frequency conversion on the micromechanical level were