Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Darrell L. Miles"'
Autor:
John Sylvestri, Larry Fischer, Sweta Pendyala, Scott Dinkel, T. Kane, S.B. Ippolito, Rich Oldrey, Manuel Villalobos, Bruce J. Redder, Michael P. Tenney, Pat McGinnis, Darrell L. Miles
Publikováno v:
International Symposium for Testing and Failure Analysis.
This paper describes novel concepts in equipment and measurement techniques that integrate optical electrical microscopy and scanning probe microscopy (SPM) capabilities into a single tool under the umbrella of optical nanoprobe electrical (ONE) micr
Autor:
John Sylvestri, Orazio P. Forlenza, Donato O. Forlenza, Peilin Song, Franco Stellari, Darrell L. Miles
Publikováno v:
ITC
In this paper, a new emission-based method for measuring the amplitude of on-chip power supply noise is presented. This technique uses Time Resolved Emission (TRE) waveforms of Light Emission from Off-State Leakage Current (LEOSLC) from CMOS gates, w
Publikováno v:
SPIE Proceedings.
We present a technique that involves tailoring the angular spectrum in optical microscopy of silicon integrated circuits, with a solid immersion lens. Spatial light modulation to select only supercritical light at the substrate/dielectric interface,
Publikováno v:
2009 IEEE International Reliability Physics Symposium.
In this paper, we present for the first time the use of an optical imaging technique that we have developed to map systematic and random variability effects across several phases of development of a new microprocessor chip fabricated with the latest
Publikováno v:
Applied Physics Letters. 92:101109
A structure for locating a fault in a semiconductor chip. The chip includes a substrate on a dielectric interconnect. A first electrical response image of the chip, which includes a spot representing the fault, is overlayed on a first reflection imag