Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Darnold, Joel R."'
Wafer and reticle positioning system for the extreme ultraviolet lithography engineering test stand.
Autor:
Wronosky, John B., Smith, Tony G., Craig, Marcus J., Sturgis, Beverly R., Darnold, Joel R., Werling, David K., Kincy, Mark A., Tichenor, Daniel A., Williams, Mark E., Bischoff, Paul M.
Publikováno v:
Proceedings of SPIE; Nov2000 Part 2, Issue 1, p829-839, 11p
Autor:
Goldsmith, John E. M., Barr, Pamela K., Berger, Kurt W., Bernardez II, Luis J., Cardinale, Gregory F., Darnold, Joel R., Folk, Daniel R., Haney, Steven J., Henderson, Craig C., Jefferson, Karen J., Krenz, Kevin D., Kubiak, Glenn D., Nissen, Rodney P., O'Connell, Donna J., Perras, Yon E., Ray-Chaudhuri, Avijit K., Smith, Tony G., Stulen, Richard H., Tichenor, Daniel A., Ver Berkmoes, Alfred A.
Publikováno v:
Proceedings of SPIE; Nov1998, Issue 1, p11-19, 9p
Publikováno v:
Proceedings of SPIE; Nov1998, Issue 1, p54-60, 7p
Autor:
Tichenor, Daniel A., Kubiak, Glenn D., Haney, Steven J., Nissen, Rodney P., Berger, Kurt W., Arling, Richard W., Ray-Chaudhuri, Avijit K., Nguyen, Khanh B., Stulen, Richard H., Wronosky, John B., Jordan, Jay D., Smith, Tony G., Darnold, Joel R., Kahle, P. M., Jojola, A. A., Kohler, Stewart M., Urenda, Ruben S., Wheeler, David R., Bjorkholm, John E., Wood II, Obert R.
Publikováno v:
Proceedings of SPIE; Nov1995, Issue 1, p292-307, 16p