Zobrazeno 1 - 10
of 18
pro vyhledávání: '"Danuta. Petelenz"'
Publikováno v:
Thin Solid Films. 286:252-255
On a p-type silicon wafer with n+ source and drain contacts, covered by a SiO2Si3N4 dielectric insulating layer, field-effect transistors were made by spin coating with a polyaniline gate electrode layer. For comparison conventional IGFETs were also
Publikováno v:
Analytical Chemistry. 67:267-272
Construction and performance of a dual quartz crystal microbalance is described. The final probe has a dipstick configuration that is particularly suitable for sensing and monitoring applications in viscous and/or conducting liquids. The differential
Publikováno v:
Electroanalysis. 5:791-794
The optimization, characterization, and analytical performance of a suspended gate field-effect transistor (SGFET), with a selective polyaniline/mercury layer, for monitoring low levels of hydrogen cyanide in air are described. Reversible and reprodu
Publikováno v:
Sensors and Actuators B: Chemical. 12:175-180
An insulated-gate field-effect transistor with the metal gate suspended 1–2 μm above the solid insulator is a miniature equivalent of a Kelvin probe. The suspended gate is a thin layer of platinum, which is mechanically supported by a layer of pol
Publikováno v:
The Analyst. 118:335-340
Fabrication of reliable chemically sensitive field effect transistors still poses significant technical difficulties. Problems related to integrity of the solid state part of the device, integrity of the final sensor package, definition of the sensit
Publikováno v:
Mikrochimica Acta. 100:169-185
Spin-coated layer of poly(maleic anhydride) has been used to planarize photolithographically prepared substrates for bilayer-based sensors. It is possible to deposit the same material on top of the spun-on layer as a Langmuir-Blodgett film. The elect
Publikováno v:
Applied Physics Letters. 63:1513-1515
Migration of surface ions in lateral fields on insulator surfaces may modify the electrical characteristics of underlying semiconductor structures causing device instabilities. A high sensitivity electrostatic force microscope is used to image the mo
Publikováno v:
Applied Physics Letters. 60:2074-2076
The relationship between the pinhole density in silicon nitride layers deposited on oxide‐silicon structures and etching in buffered hydrofluoric acid is investigated in relation to the cooling down rate after Si3N4 deposition and subsequent anneal
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 11:2121
A two‐layer lift‐off process using aluminum and an inorganic dielectric for patterning noble metals is described. It produces a smoothly sloped metallization pattern and is compatible with the deposition temperatures up to 350 °C. The metal laye
Publikováno v:
Analytical Chemistry. 57:1920-1923