Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Daniel Zschabitz"'
Publikováno v:
2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Advanced process control (APC) is widely used in semiconductor manufacturing to adjust process parameters, ensuring a high product quality, while WIP flow optimization systems for scheduling & dispatching make decisions by assigning lots to tools for
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::87d3babffb81243bb68314c751cb44c9
https://doi.org/10.1109/asmc.2015.7164449
https://doi.org/10.1109/asmc.2015.7164449
Autor:
Hermann Weindl, Stephan Melzig, Robert Barlovic, Andreas Becker, Heiko Wagner, Thomas Kowtsch, Sebastian Knappe, Dirk Grossmann, Wolfgang Jackel, Mark Reiche, Raymond Goss, Daniel Zschabitz, Jan Rothe, Uwe Schulze
Publikováno v:
2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
In recent years, randomization of process order as well as randomization of the wafer map in the cassettes delivering the wafers was increasingly used to be able to correlate yield variations with specific segments of the process flow (see [1] and [2
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::55738ae8d4b5cc3181ac502b58c5263c
https://doi.org/10.1109/asmc.2010.5551456
https://doi.org/10.1109/asmc.2010.5551456