Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Daniel R. Sprenkel"'
Publikováno v:
SPIE Proceedings.
The write time of an ALTA 3000HT mask writer has been observed to be up to 36% better than that of the ALTA 3000 system. The ALTA 3000HT system enables users to meet their performance requirements at increased production capacity with the use of new
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::df931f60e5f63944ca4b9eb9d5f67c04
https://doi.org/10.1117/12.425085
https://doi.org/10.1117/12.425085
Publikováno v:
SPIE Proceedings.
New writing strategies have been developed to meet the demand for high-volume mask manufacturing. The ALTA® 3000HT system enables users to meet their performance requirements at increased production capacity. The write time of an ALTA 3000HT mask wr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4e3f3a81a76a6e7df7758d41c7fd9b15
https://doi.org/10.1117/12.410724
https://doi.org/10.1117/12.410724