Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Daniel P. Ceperley"'
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 26:2183-2187
Surface plasmon grating couplers are optimized by separately characterizing the collection efficiency, rescattering, and transmission effects of isolated grating elements with finite difference time domain methods and then using signal flow graph met
Publikováno v:
Nano letters. 8(11)
Metal nanostructures that support surface plasmons are compelling as plasmonic circuit elements and as the building blocks for metamaterials. We demonstrate here the spontaneous self-assembly of shaped silver nanoparticles into three-dimensional plas
Autor:
Andrew M. Hawryluk, Daniel P. Ceperley, Xiaoru Wang, Yun Wang, Michael Shen, Andrew R. Neureuther
Publikováno v:
2008 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors.
Finite difference time domain simulation of the electromagnetic coupling in millisecond radiation heating is used to explore how the energy couples, where it goes in the device structure, and wavelength dependencies. Millisecond annealing is advantag
Publikováno v:
2007 International Semiconductor Device Research Symposium.
Numerical simulation is a useful tool for evaluating new technologies. In order to analyze new plasmonic and photonic band-gap devices we have re-written and extended our finite-difference time-domain (FDTD) simulator, TEMPEST, into a guided-wave ana
Publikováno v:
SPIE Proceedings.
An experimental technique for quantitatively characterizing edge effect contributions in transmission through thick photomasks is described and evaluated through electromagnetic simulation. The technique consists of comparing the 0 th order transmiss
Autor:
Daniel P. Ceperley, Timothy A. Brunner, Reg Bowley, Emily Gallagher, Anne E. McGuire, Masaru Higuchi
Publikováno v:
SPIE Proceedings.
Contact holes represent one of the biggest critical dimension (CD) mask metrology challenges for 45nm technology mask development. The challenge is a consequence of both wafer and mask sensitivities. Large mask error factors and the small process win
Publikováno v:
Techniques and Instrumentation for Detection of Exoplanets II.
The edge generated stray-light from corner boundary conditions, interactions with the lower mask structure, and surface plasmon polaritons that may limit Terrestrial Planet Finder Coronagraph performance are characterized. Previously a number of stra
Publikováno v:
SPIE Proceedings.
Rigorous finite-difference time-domain electromagnetic simulation is used to simulate the scattering from proto-typical pupil mask cross-section geometries and to quantify the differences from the normally assumed ideal on-off behavior. Shaped pupil
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 23:2578
Nanoscale phenomena and especially surface plasmon-based optical devices are playing important roles in historical and emerging applications of photography, instrumentation, imaging, and signal processing. Simulation of these devices is synergistic w
Autor:
Andrea R. Tao, Daniel P. Ceperley, Prasert Sinsermsuksakul, Andrew R. Neureuther, Peidong Yang
Publikováno v:
Nano Letters; Oct2008, Vol. 8 Issue 11, p4033-4038, 6p