Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Daniel Monteiro Diniz Reis"'
Publikováno v:
2022 IEEE International Reliability Physics Symposium (IRPS).
Publikováno v:
Applied Physics Letters. 121:209901
Publikováno v:
Applied Physics Letters. 121:162902
The reliability of piezoelectric thin films is crucial for piezoelectric micro-electromechanical system applications. The understanding of resistance degradation in piezoelectric thin films requires knowledge about point defects. Here, we show the re
Publikováno v:
2021 IEEE International Conference on the Properties and Applications of Dielectric Materials (ICPADM).
The resistance degradation of sputtered doped lead zirconate titanate thin film resulting from the lowering of the Schottky barrier height was identified by current-voltage characterization over degradation. In addition to migration of oxygen vacanci
Publikováno v:
2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF).
Leakage current degradation in a state-of-the-art integrated low-temperature PVD lead zirconate titanate (PZT) thin film stack is investigated over temperature and applied electric field for samples processed at three different conditions. It is demo
Publikováno v:
Microelectronics Reliability. :835-839
Reliability and integration of Lead Zirconate Titanate (PZT) is still a strong concern regarding its commercialization. In this work an approach to include reliability on wafer-level for integration and process development is presented. Long-term lea
Publikováno v:
2019 IEEE International Symposium on Applications of Ferroelectrics (ISAF).
In this work an enhanced physical model for leakage current degradation in lead zirconate titanate thin films is proposed and degradation kinetics are studied experimentally. For the first time, more than two defect species being active and manifesti
Publikováno v:
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).
Lead Zirconate Titanate (PZT) thin films are important for many applications in MEMS e.g. micro-mirrors, micro-speakers, or print heads. In this work reliability of an integrated low-temperature PVD PZT thin film stack for the important case of unipo