Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Daniel J. Bald"'
Autor:
Steven L. Bernasek, Daniel J. Bald
Publikováno v:
The Journal of Chemical Physics. 109:746-752
Internal energy distributions for CO2 produced in the catalytic oxidation of CO by NO on polycrystalline platinum have been directly measured using a high-resolution tunable diode laser spectrometer. Absorption spectra have been collected for CO2 pro
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f10e8b3ead6bc2ecd4d1f4dc6ee43555
https://doi.org/10.1063/1.476613
https://doi.org/10.1063/1.476613
Publikováno v:
The Journal of Chemical Physics. 104:7719-7728
Internal energy distributions for CO2 molecules produced in the catalytic oxidation of CO by O2 on polycrystalline platinum have been directly measured using a high resolution tunable diode laser (TDL) spectrometer. Absorption spectra have been colle
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ac23882ca76bb75f979cd51d483cdd68
https://doi.org/10.1063/1.471477
https://doi.org/10.1063/1.471477
Publikováno v:
SPIE Proceedings.
The reticle manufacturing process induces various defects on the mask that need to be repaired. Missing absorber or clear defects are often repaired by depositing a carbon-based material (depo) using a Focused Ion Beam (FIB) tool. Few cases of such d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a038f4a6c9c23cf223eaea7436db4e7e
https://doi.org/10.1117/12.631637
https://doi.org/10.1117/12.631637
Publikováno v:
SPIE Proceedings.
Tebaldi is a software tool developed at Intel Mask Operation (IMO) for quantitatively analyzing patterns in 2D. Its initial scope was to analyze aerial images taken with a microscope. However the software has recently been enhanced to support aerial
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a65db09d00e002e5eb9c77bc6615eee6
https://doi.org/10.1117/12.569135
https://doi.org/10.1117/12.569135
Publikováno v:
SPIE Proceedings.
In this work, we are reporting on a lithography-based methodology and automation in the design of Program Defect masks (PDM’s). Leading edge technology masks have ever-shrinking primary features and more pronounced model-based secondary features su
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e6d53fff4e567d62189ccf9b29251440
https://doi.org/10.1117/12.544536
https://doi.org/10.1117/12.544536
Publikováno v:
SPIE Proceedings.
Today's reticle inspection tools can provide a wealth of information about defects. We introduce here a system called DIVAS : Defect Inspection Viewing, Archiving, and Simulation that fully uses and efficiently manages this wealth of defect informati
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::59983120506419d91afef5b29ad4d8f0
https://doi.org/10.1117/12.467768
https://doi.org/10.1117/12.467768