Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Daniel Blenskens"'
Autor:
Klaus Zimmer, Andre Mayer, Marc Papenheim, Si Wang, Hella-Christin Scheer, Khalid Dhima, Christian Steinberg, Daniel Blenskens, Joachim Zajadacz
Publikováno v:
Microelectronic Engineering. 123:4-8
Controlled deposition of anti-sticking layers based on the use of evaporation cell.Tuning of process time and uniformity by multiple-cell arrangement.Uniformity of surface energy better than ?4% over 100mm diameter.Low surface energy (?10-15mN/m) obt
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::506dbcbda59807383522ad6ad861d2b0
https://doi.org/10.1016/j.mee.2014.04.002
https://doi.org/10.1016/j.mee.2014.04.002
Autor:
Klaus Zimmer, Khalid Dhima, Si Wang, Joachim Zajadacz, Marc Papenheim, Daniel Blenskens, Christian Steinberg, Hella-Christin Scheer
Publikováno v:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 32:06FG05
The wrinkling of SU-8 may be useful for microelectromechanical systems and optical applications, but highly regular and periodic wrinkles are the most convenient for such applications. This paper reports wrinkles generated on SU-8 by exposure to 172
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a31de32e738647fc068b0e0a4959c867
https://doi.org/10.1116/1.4898201
https://doi.org/10.1116/1.4898201