Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Dan Burbank"'
Autor:
G. Flores, Dan Burbank, David Graziosi, Keith Splawn, Alice Child, Amy Ross, J. Maule, Lisa Monaco, Andrew Steele, Norman R. Wainwright, Dean Eppler, Joseph J. Kosmo
Publikováno v:
SAE Technical Paper Series.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6f190c4b7af194bf65c3fbfa1e9f51f9
https://doi.org/10.4271/2006-01-2006
https://doi.org/10.4271/2006-01-2006
Autor:
Bob Jon Carlson, Dan Burbank
Publikováno v:
Electron-Beam, X-Ray, and Ion-Beam Technology for Submicrometer Lithographies V.
The Proximity Effect which results from electron scattering can be corrected in a number of ways. The most rigorous methods use computed changes to the pattern database and are very costly to perform on very large circuit patterns. Alternatives are p
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b6efeac26ffd8e23f15246c02115d574
https://doi.org/10.1117/12.963662
https://doi.org/10.1117/12.963662
Publikováno v:
Annual Meeting Optical Society of America.
Previous experimental (1) and theoretical (2) work has shown that onedimensional gratings having high spatial frequency and simple surface relief profile can produce extraordinary antireflective properties (very low reflectivity over a broad waveband
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fd33388edb9c1c99c15ec51a8b5ffe48
https://doi.org/10.1364/oam.1989.pd4
https://doi.org/10.1364/oam.1989.pd4