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Publikováno v:
2020 3rd International Conference on Power and Energy Applications (ICPEA).
Nano-fabrication techniques are an ever-growing field that has led to the leading cutting edge nano-technologies of today. Atomic layer deposition (ALD) has manifested itself as a key player to produce highly uniform and conformal nano thin film prod
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::162965e112906ba593b6f9c38daeaa4c
https://doi.org/10.1109/icpea49807.2020.9280127
https://doi.org/10.1109/icpea49807.2020.9280127
