Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Damien Callet"'
Autor:
Sylwester Bargiel, Malgorzata Kujawinska, Piotr Dziuban, Damien Callet, Sven Frank, Christophe Gorecki, Jerzy Krezel, Karolina Laszczyk
Publikováno v:
Sensors and Actuators A: Physical. 163:255-265
We report the design, fabrication and characterization of a newly developed electrostatic silicon X – Y micro-stage with large displacement, suitable for many MOEMS including raster scanning devices. The micro-stage consists of four electrostatic c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::09d85ba35351b9c8396ca445a7daaca8
https://doi.org/10.1016/j.sna.2010.06.020
https://doi.org/10.1016/j.sna.2010.06.020
Autor:
Damien Callet, Patrice Pischedda
Publikováno v:
SAE Technical Paper Series.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9fe671a6b880e574051b062ea2b7d366
https://doi.org/10.4271/2005-26-049
https://doi.org/10.4271/2005-26-049
Autor:
Herth, Etienne, Belharet, Djaffar, Edmond, Samson, Bouville, David, Robert, Laurent, Lardet‐Vieudrun, Franck
Publikováno v:
Contributions to Plasma Physics; Aug2021, Vol. 61 Issue 7, p1-8, 8p