Výsledky vyhledávání - "Daisy Raymondson"

Lloyd’s mirror interference lithography below a 22-nm pitch with an accessible, tabletop, 13.5 nm high-harmonic EUV source

Autor: Henry Kaptyen, Sonia Castellanos, Eric Rinard, Esben W. Larsen, Nadia Vandenbroeck, John S. Petersen, Daisy Raymondson, Rod Ward, Danilo De Simone, Seth L. Cousin, Kevin Dorney, Peter De Schepper, C. Bargsten, Fabian Holzmeier, Dhirendra P. Singh, Paul van der Heide, Alessandro VaglioPret, Thomas Nuytten

Publikováno v: Novel Patterning Technologies 2021.

Recently, imec has installed and commissioned an industrial, ultrafast EUV materials characterization and lithography lab, imec’s AttoLab, with a primary aim to explore limits of photoresist performance and their associated ultrafast chemistries. H

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::7c896d7feed26b318a41922fdb5f5487
https://doi.org/10.1117/12.2595048

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Introduction to imec's AttoLab for ultrafast kinetics of EUV exposure processes and ultra-small pitch lithography

Publikováno v: Novel Patterning Technologies 2021.

Imec’s AttoLab is the first industrial laboratory capable of watching the ultrafast dynamics of photoresists following 13.5 nm, EUV exposure, and for emulating high-numerical-aperture (high-NA) exposure on 300-mm wafers using two-beam EUV interfere

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::79c75220040bd26112ca48ac884c0018
https://doi.org/10.1117/12.2595038

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High numerical aperture tabletop soft x-ray diffraction microscopy with 70-nm resolution

Autor: Przemyslaw Wachulak, Changyong Song, Chan La-o-vorakiat, Carmen S. Menoni, Ariel Paul, Henry C. Kapteyn, Mario C. Marconi, Jianwei Miao, Edwin A. Lee, Jorge J. Rocca, Margaret M. Murnane, Richard L. Sandberg, Anne Sakdinawat, Bagrat Amirbekian, Daisy Raymondson

Publikováno v: Proceedings of the National Academy of Sciences. 105:24-27

Light microscopy has greatly advanced our understanding of nature. The achievable resolution, however, is limited by optical wavelengths to approximately 200 nm. By using imaging and labeling technologies, resolutions beyond the diffraction limit can

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::28dad435525a7721df66e9f55a9c8677
https://doi.org/10.1073/pnas.0710761105

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Ultrafast Optical Parametric Oscillator Pumped by an All Normal Dispersion (ANDi) Yb: Fiber Oscillator

Autor: Lora Nugent-Glandorf, Henry C. Kapteyn, Frank W. Wise, Daisy Raymondson, Margaret M. Murnane, Sterling Backus, Charles G. Durfee, Andrew Niedringhaus, Matthew S. Kirchner

Publikováno v: Conference on Lasers and Electro-Optics 2012.

We describe a 13 nJ, 100 fs, 60 MHz Yb:Fiber ANDi oscillator that pumps a MgO 2 :PPLN optical parametric oscillator (OPO), producing up to 300 mW (signal+idler) of total output, and overall efficiency of 37%.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::61fd24f8e37a2536838150471ddacbaf
https://doi.org/10.1364/cleo_si.2012.cm1b.1

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Tabletop coherent diffractive microscopy with extreme ultraviolet light from high harmonic generation

Autor: Daisy Raymondson, Chan La-o-vorakiat, Ariel Paul, Henry C. Kapteyn, Ethan L. Townsend, Kevin S. Raines, William F. Schlotter, Anne Sakdinawat, Jianwei Miao, Richard L. Sandberg, Margaret M. Murnane

Publikováno v: Metrology, Inspection, and Process Control for Microlithography XXIII.

We demonstrate lensless diffractive microscopy using a tabletop source of extreme ultraviolet (EUV) light from high harmonic generation at 29 nm and 13.5 nm. High harmonic generation has been shown to produce fully spatially coherent EUV light when t

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::b1069a1f9be4a2c762d2d2c43438830f
https://doi.org/10.1117/12.814313

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Tabletop Coherent Diffractive Microscopy with Soft X-rays from High Harmonic Generation at 13.5 nm

Autor: William F. Schlotter, Margaret M. Murnane, Chan La-o-vorakiat, Kevin S. Raines, Richard L. Sandberg, Ethan L. Townsend, Jianwei Miao, Matthew D. Seaberg, Henry C. Kapteyn, Daisy Raymondson

Publikováno v: Conference on Lasers and Electro-Optics/International Quantum Electronics Conference.

We demonstrate lensless diffractive microscopy with 92nm resolution using 13.5nm light from high harmonic generation. Fast image retrieval with Fourier transform holography is shown, and we present paths to refining the images to higher resolution.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::e610eefce7c832d477dc7271b10ccf22
https://doi.org/10.1364/cleo.2009.cme5

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Lensless Microscopy and Holography with 60 nm Resolution using Tabletop Coherent Soft X-Rays

Autor: Anne Sakdinawat, Daisy Raymondson, William F. Schlotter, Richard L. Sandberg, Jianwei Miao, Kevin S. Raines, Margaret M. Murnane, Chan La-o-vorakiat, Ariel Paul, Henry C. Kapteyn

Publikováno v: Springer Series in Chemical Physics ISBN: 9783540959458

We demonstrate high numerical aperture lensless diffractive imaging and Fourier transform holography using high harmonic generation from an ultrafast laser system. The HHG source operates at 29 nm or 13 nm wavelength and achieves 60 nm resolution.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::1da30330f717866303c4197014e4f64f
https://doi.org/10.1007/978-3-540-95946-5_48

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Lensless Imaging Using Table-Top Soft X-Ray Lasers and High Harmonics Sources Reaching 70 nm Resolution

Autor: Henry C. Kapteyn, R. L. Sandberg, Eric Lee, Carmen S. Menoni, Jorge J. Rocca, Daisy Raymondson, Bagrat Amirbekian, Mario C. Marconi, Changyong Song, C. La-O-Vorakiat, M. M. Murnane, Przemyslaw Wachulak, A. E. Sakdinawat, Jianwei Miao, Y. Liu, A. Paul

Publikováno v: Springer Proceedings in Physics ISBN: 9781402099236

A very promising high resolution imaging technique currently under rapid development is x-ray diffraction microscopy (or lensless imaging), in which a coherent x-ray diffraction pattern of a non-crystalline specimen is measured. In this technique, a

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::d0baf8b7afb036cab78fe4521d25129a
https://doi.org/10.1007/978-1-4020-9924-3_50

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Carrier-envelope stabilization of high-average-power ultrafast laser amplifier systems

Autor: Henry C. Kapteyn, Daisy Raymondson, S. Backus, Etienne Gagnon, Paul Arpin, Margaret M. Murnane, Dirk Müller, Ming-Chang Chen

Publikováno v: 2008 Conference on Lasers and Electro-Optics.

We report results from thorough characterization of a high average-power, cryogenically cooled, carrier-envelope phase (CEP) stabilized ultrafast laser system. We also discuss the effect of signal averaging on measured RMS noise in CEP.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::ab6d60568db9f5db5eb2409904f67bde
https://doi.org/10.1109/cleo.2008.4551530

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Multiple reference Fourier transform holography using coherent high-harmonic soft-x-rays

Autor: Daisy Raymondson, Henry C. Kapteyn, William F. Schlotter, Chan La-o-vorakiat, Ariel Paul, Margaret M. Murnane, Richard L. Sandberg

Publikováno v: 2008 Conference on Lasers and Electro-Optics.

We demonstrate multiple reference Fourier transform holography with coherent soft X-rays from a tabletop high harmonic source for the first time. Simple reconstruction using a two dimensional Fourier transform shows a 90 nm resolution.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::3ce67138743aefd7742a056f5b0d8541
https://doi.org/10.1109/cleo.2008.4551132

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