Zobrazeno 1 - 9
of 9
pro vyhledávání: '"Daichi Kakuta"'
Autor:
Takahisa Oda, Haruhiko Fukaya, Koichi Takeya, Yukio Hitotsuyanagi, Daichi Kakuta, Maho Hikita
Publikováno v:
Tetrahedron. 63:1008-1013
Four new alkaloids, sessilifoliamides E, F, G, and H were isolated from the roots of Stemona sessilifolia (Miq.) Miq., together with a known alkaloid, tuberostemonone. The structures of new alkaloids were elucidated by interpretation of the spectral
Publikováno v:
Tetrahedron. 59:7779-7786
Four new Stemona alkaloids, sessilifoliamides A–D ( 1–4 ), were isolated from the roots of Stemona sessilifolia, along with five known alkaloids, stenine ( 5 ), 2-oxostenine ( 6 ), stemoninoamide ( 7 ), tuberostemonone ( 8 ), and neotuberostemono
Publikováno v:
21st Annual BACUS Symposium on Photomask Technology.
An alternating phase shift mask technique is one of the candidates to extend the KrF excimer laser lithography generation. One of the issues for practical fabrication of Alt-PSMs is a repair of quartz bump defects. A conventional focused-ion beam (FI
Publikováno v:
SPIE Proceedings.
We have optimized a fabrication process of an alternating phase shift mask (alt-PSM) with dual trench structure. In quartz etching process using a RIE system, one of the key issues is to obtain a precise controllability of phase mean to target. In or
Publikováno v:
SPIE Proceedings.
An alternating phase shift mask (Alt-PSM) technique is one of the candidates to extend the KrF excimer laser lithography generation. One of the issues for practical fabrication of Alt-PSMs is a repair of quartz bump defects. A conventional focused-io
Publikováno v:
SPIE Proceedings.
We have developed a Cr-based attenuated phase shift mask process for 0.18 micrometer device generation. The fabrication process including formation of opaque patterns with an electric conductive material is introduced. With a Cr-based attenuated phas
Publikováno v:
SPIE Proceedings.
Making attenuated phase shift masks for KrF excimer laser lithography is going to be on the mass production stage for the 0.18 micrometer critical hole and line layers. Here, key issues are phase controllability, critical dimension (CD) control on th
Conference
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Conference
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