Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Dahir Gaev"'
Publikováno v:
Applied Mechanics and Materials. :108-111
The results of studies relating to the use of porous silicon as the basis for the creation of nanostructured getter layers for MEMS are presented. New technical solutions, in which the porous silicon with pores of micro- and nanometer range is used a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::cf64dce5d41c0b07fb606613cc334658
https://doi.org/10.4028/www.scientific.net/amm.313-314.108
https://doi.org/10.4028/www.scientific.net/amm.313-314.108
Publikováno v:
Materials Sciences and Applications. :57-61
The results of observation of different structuring techniques of thin metal layers applied in micro system technologies are presented. The Ti V getter films formed by magnetron sputtering have been explored using scanning electron and atomic-force m
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8de6054e596e671b7f8261480263cf95
https://doi.org/10.4236/msa.2013.48a007
https://doi.org/10.4236/msa.2013.48a007
Autor:
Sergei P. Timoshenkov, Sergei A. Gavrilov, Rustam M. Kalmykov, Anton Boyko, O. Pyatilova, Dahir Gaev
Publikováno v:
SPIE Proceedings.
Study of new materials and composites based on porous silicon is of great interest for electronics and microelectronics industry. Functional characteristics of structured layers are closely associated with their morphology properties and treatment co
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::76a2221344b44a3df739871e8c4599cb
https://doi.org/10.1117/12.2267147
https://doi.org/10.1117/12.2267147
Publikováno v:
2013 IEEE XXXIII International Scientific Conference Electronics and Nanotechnology (ELNANO).
Copper layers of highly developed surface have been formed by electrodeposition technique on structurally modified silicon substrate. Silicon patterns were obtained by electrochemical anodizing as well as by wet etching and acted the part of solidifi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3970a46f268e939aa30cf17f694608ad
https://doi.org/10.1109/elnano.2013.6551999
https://doi.org/10.1109/elnano.2013.6551999