Zobrazeno 1 - 1
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pro vyhledávání: '"Da-Bin Hyun"'
Publikováno v:
Electronic Materials Letters. 15:357-362
Pad conditioners are important consumables for semiconductor chemical mechanical planarization processes. Recently, a new concept has been developed to improve the performance and lifetime of a pad conditioner by depositing diamond film on a uniforml
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8be60056c36e794bd0b5011bbd4eca26
https://doi.org/10.1007/s13391-019-00123-0
https://doi.org/10.1007/s13391-019-00123-0
