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pro vyhledávání: '"DUV AlGaN multi-quantum wells"'
Autor:
Shucheng Ge, Jiangping Dai, Na Gao, Shiqiang Lu, Penggang Li, Kai Huang, Bin Liu, Junyong Kang, Rong Zhang, Youdou Zheng
Publikováno v:
Nanoscale Research Letters, Vol 14, Iss 1, Pp 1-7 (2019)
Abstract Deep ultraviolet AlGaN-based nanorod (NR) arrays were fabricated by nanoimprint lithography and top-down dry etching techniques from a fully structural LED wafer. Highly ordered periodic structural properties and morphology were confirmed by
Externí odkaz:
https://doaj.org/article/c10918848abf4f94acdd81e2f0ab0771
Autor:
Na Gao, Jiangping Dai, Penggang Li, Youdou Zheng, Ge Shucheng, Junyong Kang, Shiqiang Lu, Bin Liu, Kai Huang, Rong Zhang
Publikováno v:
Nanoscale Research Letters
Nanoscale Research Letters, Vol 14, Iss 1, Pp 1-7 (2019)
Nanoscale Research Letters, Vol 14, Iss 1, Pp 1-7 (2019)
Deep ultraviolet AlGaN-based nanorod (NR) arrays were fabricated by nanoimprint lithography and top-down dry etching techniques from a fully structural LED wafer. Highly ordered periodic structural properties and morphology were confirmed by scanning
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