Zobrazeno 1 - 10
of 99
pro vyhledávání: '"D.R. Kania"'
Publikováno v:
Materials Technology. 11:120-123
Autor:
C.M. Brown, J.F. Seely, D.R. Kania, B.A. Hammel, C.A. Back, R.W. Lee, A. Barshalom, W.E. Behring
Publikováno v:
Atomic Data and Nuclear Data Tables. 58:203-217
Publikováno v:
Surface and Coatings Technology. 47:356-364
Intrinsic photoconductivity is studied in microwave plasma-enhanced chemically vapor deposited polycrystalline diamond thin films. Two excitation sources are used to excite free carriers: a mode-locked Nd:YAG laser producing UV pulses 3–5 ps in dur
Autor:
W. W. Hofer, Ravindra P. Joshi, D.R. Kania, R.D. Scarpetti, Karl H. Schoenbach, C. Molina, R.P. Brinkmann
Publikováno v:
Ninth IEEE International Pulsed Power Conference.
We are developing a high voltage, high average power, electron-beam controlled diamond switch that could significantly impact high power solid-state electronics in industrial and defense applications. An electron-beam controlled thin-film diamond cou
Autor:
D.R. Kania
Goal was to determine the field emission of laser-ablated hard carbon coatings. The coatings, deposited on Mo tip arrays, were found (with ion field emission microscope) to have excellent Fowler-Nordheim behavior: plots of the logarithm of emission c
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a751cd94d91f07797cf0a6078fd5ffa5
https://doi.org/10.2172/491834
https://doi.org/10.2172/491834
Autor:
S.P. Vernon, D.R. Kania, P.A. Kearney, R.A. Levesque, A.V. Hayes, B. Druz, E. Osten, R. Rajan, H. Hedge
Publikováno v:
Extreme Ultraviolet Lithography (TOPS).
We report on the growth of low defect density Mo/Si multilayer (ML) coatings. The coatings were grown in a deposition system specifically designed for EUVL reticle blank fabrication. Complete, 81 layer, high reflectance Mo/Si ML coatings were deposit
Effects of induced spatial incoherence on laser light absorption and x-ray conversion at 0.53 microm
Publikováno v:
Physical review. A, Atomic, molecular, and optical physics. 43(2)
Gold disk targets were irradiated with and without induced spatial incoherence (ISI) at {lambda}=0.526 {mu}m and intensities of (1--5){times}10{sup 14} W/cm{sup 2}. The distribution of laser energy on target and {ital M}-band x-ray (2--4 keV) pinhole
Autor:
D. S. Sweeney, F. Zernike, B. La Fontaine, J. E. Bjorkholm, S.P. Vernon, R. N. Kestner, G.E. Sommargren, D.R. Kania, D.P. Gaines, Daniel A. Tichenor
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 14:3706
We have demonstrated significant advances in the production of aspheric optics for extreme ultraviolet lithography. An optic has been fabricated with an aspheric departure of 1.5 {mu}m, a figure error of 0.7 nm rms and a nanoroughness of 0.25 nm rms.
Akademický článek
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