Zobrazeno 1 - 3
of 3
pro vyhledávání: '"D.K.W. Chau"'
Publikováno v:
ICSE'98. 1998 IEEE International Conference on Semiconductor Electronics. Proceedings (Cat. No.98EX187).
Some lots of wafers were reported with low yield due to ANADC pattern functional failure. SEM, EDX and 155 Wright etch techniques were used to identify the root causes. Cross sectional results found the nodules on substrate at the contact area. EDX a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8b4a28b08a88066aba9211e5d17ae2bc
https://doi.org/10.1109/smelec.1998.781141
https://doi.org/10.1109/smelec.1998.781141
Autor:
H.F. Chan, J.H.M. Chan, P.C.K. Li, C.W.Z. Leung, G.H.F. Mak, Y.F. Cheung, D.K.W. Chau, P.M.Y. Lau
Publikováno v:
Hong Kong Physiotherapy Journal. 31:104
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1a3619ed17f27a32c80ff6bf4997bced
https://doi.org/10.1016/j.hkpj.2013.08.016
https://doi.org/10.1016/j.hkpj.2013.08.016
Publikováno v:
Hong Kong Physiotherapy Journal. (2):104
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::450539066d5509c12e906e218e631485