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pro vyhledávání: '"D. V. Voloshin"'
Autor:
D. V. Voloshin
Publikováno v:
Tomsk state pedagogical university bulletin. :141-146
Publikováno v:
Measurement Techniques. 53:878-881
Cross measurements of surface relief of nanometer dimensions using atomic-force microscopy and optical interferometry methods are described. The investigations enable the regions where it is best to use these methods for different kinds of objects to