Zobrazeno 1 - 10
of 22
pro vyhledávání: '"D. V. Sitanov"'
Autor:
D. V. Sitanov
Publikováno v:
From Chemistry Towards Technology Step-By-Step. 4:124-135
Publikováno v:
High Temperature. 60:S146-S152
Publikováno v:
Russian Microelectronics. 50:39-44
The effect of a mixture’s composition on the electrophysical parameters and emission spectra of HCl/Cl2 and HCl/He plasmas under the conditions of a DC glow discharge is analyzed. The data on the gas temperature and reduced electric field strength
Autor:
D. V. Sitanov
Publikováno v:
From Chemistry Towards Technology Step-By-Step. 2:85-92
Autor:
S. A. Pivovarenok, D. V. Sitanov
Publikováno v:
Plasma Physics Reports. 44:713-722
The recombination kinetics of chlorine atoms on the wall of a plasmachemical reactor and on silicon samples in the positive column of a glow discharge in Cl2 has been studied experimentally. The rate constants and probabilities of the heterogeneous r
Autor:
S. A. Pivovarenok, D. V. Sitanov
Publikováno v:
Russian Microelectronics. 47:34-39
It is demonstrated that plasma techniques can be used to detect various defects on a solid surface by a self-sustained discharge under atmospheric pressure. Special attention is paid to controlling surface defects and the end cleavages of semiconduct
Autor:
D. V. Sitanov, S. A. Pivovarenok
Publikováno v:
High Energy Chemistry. 51:292-296
The absolute values of the rate constants for heterogeneous recombination of chlorine atoms on the surface of aluminum and copper in the positive column of a glow discharge in Cl2 have been determined using the pulse relaxation technique.
Publikováno v:
High Energy Chemistry. 51:224-228
The interaction of copper with chlorine-containing gases has been studied. The resulting kinetic relationships are linear, indicating that the process occurs in a steady-state mode. It has been found that biases of −61 and −107 W provide energy o
Autor:
D. V. Sitanov, S. A. Pivovarenok
Publikováno v:
High Temperature. 55:461-464
The kinetics of heterogeneous recombination of chlorine atoms on glass and solid samples bounding the plasma zone was investigated. The absolute values of rate constants of heterogeneous recombination of chlorine atoms (the recombination probabilitie
Publikováno v:
Russian Microelectronics. 40:316-320
Atomic recombination in chlorine plasma on the surface of the plasma chemical reactor made from molybdenum glass and in the presence of stainless-steel samples is investigated using the relaxation pulsed procedure jointly with absorption spectroscopy