Zobrazeno 1 - 10
of 21
pro vyhledávání: '"D. V. Sitanov"'
Autor:
D. V. Sitanov
Publikováno v:
From Chemistry Towards Technology Step-By-Step. 4:124-135
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3938c60a53dba575ef5d74e1e630f0ca
https://doi.org/10.52957/27821900_2023_01_124
https://doi.org/10.52957/27821900_2023_01_124
Publikováno v:
High Temperature. 60:S146-S152
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::f2317a6803064132d6274a4c6d1e9c6a
https://doi.org/10.1134/s0018151x21050187
https://doi.org/10.1134/s0018151x21050187
Publikováno v:
Russian Microelectronics. 50:39-44
The effect of a mixture’s composition on the electrophysical parameters and emission spectra of HCl/Cl2 and HCl/He plasmas under the conditions of a DC glow discharge is analyzed. The data on the gas temperature and reduced electric field strength
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::59879638a1d0a3c4de2172860272532b
https://doi.org/10.1134/s1063739720060098
https://doi.org/10.1134/s1063739720060098
Autor:
D. V. Sitanov
Publikováno v:
From Chemistry Towards Technology Step-By-Step. 2:85-92
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::43386dffb9ef3383db80e8551380acb9
https://doi.org/10.52957/27821900_2021_04_85
https://doi.org/10.52957/27821900_2021_04_85
Autor:
S. A. Pivovarenok, D. V. Sitanov
Publikováno v:
Plasma Physics Reports. 44:713-722
The recombination kinetics of chlorine atoms on the wall of a plasmachemical reactor and on silicon samples in the positive column of a glow discharge in Cl2 has been studied experimentally. The rate constants and probabilities of the heterogeneous r
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::12fabad7215c0632b1a346302005e9d9
https://doi.org/10.1134/s1063780x1808007x
https://doi.org/10.1134/s1063780x1808007x
Autor:
S. A. Pivovarenok, D. V. Sitanov
Publikováno v:
Russian Microelectronics. 47:34-39
It is demonstrated that plasma techniques can be used to detect various defects on a solid surface by a self-sustained discharge under atmospheric pressure. Special attention is paid to controlling surface defects and the end cleavages of semiconduct
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::846f30c353ec0e768ae5d67e888a8d31
https://doi.org/10.1134/s1063739718010067
https://doi.org/10.1134/s1063739718010067
Autor:
D. V. Sitanov, S. A. Pivovarenok
Publikováno v:
High Energy Chemistry. 51:292-296
The absolute values of the rate constants for heterogeneous recombination of chlorine atoms on the surface of aluminum and copper in the positive column of a glow discharge in Cl2 have been determined using the pulse relaxation technique.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a5844a96b39c9fa2aa70853392c2b776
https://doi.org/10.1134/s0018143917040130
https://doi.org/10.1134/s0018143917040130
Publikováno v:
High Energy Chemistry. 51:224-228
The interaction of copper with chlorine-containing gases has been studied. The resulting kinetic relationships are linear, indicating that the process occurs in a steady-state mode. It has been found that biases of −61 and −107 W provide energy o
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6264fbc9e2cef22b3eccd9ae5f47c23e
https://doi.org/10.1134/s0018143917030031
https://doi.org/10.1134/s0018143917030031
Autor:
D. V. Sitanov, S. A. Pivovarenok
Publikováno v:
High Temperature. 55:461-464
The kinetics of heterogeneous recombination of chlorine atoms on glass and solid samples bounding the plasma zone was investigated. The absolute values of rate constants of heterogeneous recombination of chlorine atoms (the recombination probabilitie
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::979316ce7b10b2924f133ba02ebdc8bd
https://doi.org/10.1134/s0018151x1703021x
https://doi.org/10.1134/s0018151x1703021x
Publikováno v:
Russian Microelectronics. 40:316-320
Atomic recombination in chlorine plasma on the surface of the plasma chemical reactor made from molybdenum glass and in the presence of stainless-steel samples is investigated using the relaxation pulsed procedure jointly with absorption spectroscopy
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ed98a3aea1b1a107007e3b969c7b24d9
https://doi.org/10.1134/s1063739711050040
https://doi.org/10.1134/s1063739711050040