Zobrazeno 1 - 10
of 53
pro vyhledávání: '"D. S. Seregin"'
Autor:
A. A. Orlov, A. A. Rezvanov, V. A. Gvozdev, G. A. Orlov, D. S. Seregin, P. I. Kuznetsov, T. Blumberg, A. A. Veselov, T. Suzuki, E. N. Morozov, K. A. Vorotilov
Publikováno v:
Russian Microelectronics. 51:470-479
Autor:
Aleksandra V. Atanova, Alexander Sigov, O. M. Zhigalina, D. N. Khmelenin, D. S. Seregin, K. A. Vorotilov, Georgy A. Orlov
Publikováno v:
Journal of the American Ceramic Society. 105:639-652
Autor:
L. A. Delimova, N. V. Zaitseva, V. V. Ratnikov, V. S. Yuferev, D. S. Seregin, K. A. Vorotilov, A. S. Sigov
Publikováno v:
Physics of the Solid State. 63:1145-1152
Autor:
D. S. Seregin, N. M. Kotova, A. V. Atanova, K. A. Vorotilov, D. N. Khmelenin, O. M. Zhigalina
Publikováno v:
Ferroelectrics. 574:29-36
The structure of lanthanum nickelate (LNO) thin film electrodes prepared by chemical solution deposition has been investigated. Features of LNO microstructure have been studied using high-resolutio...
Autor:
V. N. Kurlov, G. A. Orlov, V. S. Nozdrin, D. S. Seregin, A. S. Sigov, K. A. Vorotilov, G. A. Komandin
Publikováno v:
Doklady Physics. 65:51-56
Wide-range measurements of thin films of SiCxOyHz organosilicate glasses, both dense and porous, deposited on dielectric sapphire substrates and conductive layers of platinum and aluminum, were performed in the THz–IR (5–5000 cm–1) range. This
Publikováno v:
Physics of the Solid State. 61:2464-2467
A Pb(Zr0.52Ti0.48)O3–LaNiO3–Si composition and LaNiO3 thin films are synthesized using chemical solution deposition and studied by transmission electron microscopy. The polycrystalline, porous structure of LaNiO3 is found to misalign the columnar
Autor:
D. S. Seregin, O. M. Zhigalina, N. M. Kotova, A. V. Atanova, D. N. Khmelenin, K. A. Vorotilov
Publikováno v:
Crystallography Reports. 64:961-967
The phase composition and specific features of the microstructures of layers in the Pb(Zr0.52Ti0.48)O3–LaNiO3–Si and Pb(Zr0.52Ti0.48)O3–LaNiO3–SiOx–Si compositions grown by chemical vapor deposition from solutions have been investigated by
Autor:
D. S. Seregin, Mikhail R. Baklanov, Ivan Ovchinnikov, K. A. Vorotilov, V. A. Gvozdev, D. A. Abdullaev, A. A. Rezvanov, T. Blomberg, A. A. Veselov
Publikováno v:
2021 IEEE International Interconnect Technology Conference (IITC).
Mechanical properties of low-k dielectrics deposited on a surface with patterned metal (Cu) lines are evaluated by using atomic force microscopy (AFM) in the PeakForce quantitative mapping (PFQNM) mode. It is shown that Young’s modulus (YM) of comp
Autor:
Nina Zaitseva, V. V. Ratnikov, Liubov Delimova, K. A. Vorotilov, Alexander Sigov, Valentine Yuferev, D. S. Seregin
Publikováno v:
2021 IEEE International Symposium on Applications of Ferroelectrics (ISAF).
Two types of ferroelectric PZT films deposited at the same conditions on Silicon-on-Sapphire (SOS) and Si substrates are studied. The PZT on SOS shows a single (111) texture, symmetric hysteresis loops with high polarization values. The PZT film on S
Autor:
M. Redzheb, Shuhua Wei, D. S. Seregin, Wei-Yuan Chang, Mikhail R. Baklanov, Alexey S. Vishnevskiy, N. M. Kotova, Yue Han Wu, Yingjie Wang, Jing Zhang, Sergej Naumov, Jihperng Leu, K. A. Vorotilov
Publikováno v:
Thin Solid Films. 685:329-334
Carbon-bridged organosilicate films deposited by using different precursors are studied by both experimentally and theoretically. It is shown that carbon-bridged OSG films have higher Young Modulus (E) than methyl-terminated films and E(phenylene) >