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Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 9:1977-1985
Ionization gauges are commonly used for pressure measurement from the lowest achievable pressures to 10−2 Torr. Two types exist: In the hot cathode gauge (HCG) the source of the ionizing electrons is a thermionic cathode. In the cold cathode gauge