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pro vyhledávání: '"D. R. Miga"'
Autor:
Eric J. White, Russell T. Herrin, Christopher V. Jahnes, I. Vitomirov, Z.X. He, Dana Dereus, D. R. Miga, S. E. Luce, Shawn J. Cunningham, Art Morris, William J. Murphy, S. R. Dupuis, Jeffrey C. Maling, A. Gupta, A.K. Stamper
Publikováno v:
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.
MEMS capacitor switches have been integrated with high voltage CMOS ICs. The MEMS were formed with the final three AlCu wiring levels in SiO 2 using a planar sacrificial silicon cavity process. The MEMS cavities were hermetically sealed at less than
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::80e9e215e72d470be66b4789fd5467b7
https://doi.org/10.1109/transducers.2011.5969479
https://doi.org/10.1109/transducers.2011.5969479
