Zobrazeno 1 - 4
of 4
pro vyhledávání: '"D. M. Grigor'ev"'
Publikováno v:
Nano- i Mikrosistemnaya Tehnika. 20:491-497
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::dc2fa29c3d113c97f744bc7aeaac772d
https://doi.org/10.17587/nmst.20.491-497
https://doi.org/10.17587/nmst.20.491-497
Publikováno v:
Russian Microelectronics. 47:211-216
The frequency response of a MEMS microphone is largely dependent on the design and size of the package. The location and size of the acoustic port, the dimensions of the front and back chamber, and the packaging material are of key importance. In thi
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::194599b38f4b24dfb3deac72bfeba93d
https://doi.org/10.1134/s106373971803006x
https://doi.org/10.1134/s106373971803006x
Publikováno v:
Russian Microelectronics. 46:396-403
The C-V curve is an important characteristic of a MEMS microphone as it determines its operating voltage and sensitivity. Due to the complicated geometry of its fixed perforated backplate and thin movable diaphragm, it requires finite element modelin
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e9c5635eda98e422416123cf9245dc58
https://doi.org/10.1134/s1063739717060075
https://doi.org/10.1134/s1063739717060075
Publikováno v:
Russian Microelectronics. 44:487-491
The model of microsystem of mechatronic device with magnetic transistor converters is investigated experimentally. It was established that microsystem of mechatronic devices with silicon console, micromagnet and magnetic transistor converters enables
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e0e66742bc9238a8089b8c0075abc2e9
https://doi.org/10.1134/s1063739715070082
https://doi.org/10.1134/s1063739715070082