Výsledky vyhledávání

Kinetics and coupled dynamics of dewetting and chemical reaction in Si/SiO2/Si system

Autor: Pierre Muller, D Landru, Fabien Cheynis, Stefano Curiotto, Frédéric Leroy, O Kononchuk

Publikováno v: Journal of Materials Science
Journal of Materials Science, 2020, ⟨10.1007/s10853-020-05161-w⟩
Journal of Materials Science, Springer Verlag, 2020, ⟨10.1007/s10853-020-05161-w⟩
HAL

We report on the observation of a coupling between the dewetting of a Si layer on $$\hbox {SiO}_{{2}}$$ induced by surface/interface energy minimization and the etching between both materials due to the $$\hbox {Si}+\hbox {SiO}_{2}\longrightarrow 2$$

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::abc838e659fcf0c4970fc16b9d45024e
https://hal.science/hal-03025140

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SiGe nano-heteroepitaxy: An investigation of the nano-template

Autor: M. Mastari, J.M. Hartmann, Maxime Argoud, Matthew Charles, A.M. Papon, O. Kononchuck, Raluca Tiron, D. Landru, Patricia Pimenta-Barros, Y. Kim

Publikováno v: Journal of Crystal Growth
Journal of Crystal Growth, Elsevier, 2019, 527, pp.125232-. ⟨10.1016/j.jcrysgro.2019.125232⟩
Journal of Crystal Growth, 2019, 527, pp.125232-. ⟨10.1016/j.jcrysgro.2019.125232⟩

In this paper, we have evaluated the impact of the nano-template used for the nano-heteroepitaxy of SiGe layers in a 300 mm industrial Reduced Pressure-Chemical Vapour Deposition tool. A process flow based on diblock copolymer patterning was used to

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a65b04ed84b5b7432aa0f494f6e1e22a
https://hal.archives-ouvertes.fr/hal-03487321

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SiGe nano-heteroepitaxy on Si and SiGe nano-pillars

Autor: Patricia Pimenta-Barros, Maxime Argoud, Matthew Charles, Jean-Michel Hartmann, M. Mastari, Patrice Gergaud, Y. Bogumilowicz, A.M. Papon, D. Landru, Y. Kim, Q. M. Thai

Publikováno v: Nanotechnology
Nanotechnology, Institute of Physics, 2018, 29 (27), pp.275702. ⟨10.1088/1361-6528/aabdca⟩
Nanotechnology, 2018, 29 (27), pp.275702. ⟨10.1088/1361-6528/aabdca⟩

International audience; In this paper, SiGe nano-heteroepitaxy on Si and SiGe nano-pillars was investigated in a 300 mm industrial reduced pressure-chemical vapour deposition tool. An integration scheme based on diblock copolymer patterning was used

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a0ea6181bcc35fea6b9423fbeeed8f96
https://hal-cea.archives-ouvertes.fr/cea-02185214

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Akademický článek

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Aide information à la sélection des revêtements et des traitements de surface

Autor: Y. Brechet, D. Landru, C. Tassin

Publikováno v: Matériaux & Techniques. 90:3-18

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::20eb63eebf1b47bc752e952b6c8a70cd
https://doi.org/10.1051/mattech/200290010003

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Challenges in materials and process selection

Autor: Yves Bréchet, L. Salvo, D. Landru, D. Bassetti

Publikováno v: Progress in Materials Science. 46:407-428

Recent developments are outlined of materials and process selection methods leading towards industrial applications. The systematic implementation of selection for multiple criteria and multiple design elements is presented as a natural extension of

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::2388b6c3c3c7bc56fb6650e789768e71
https://doi.org/10.1016/s0079-6425(00)00019-0

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