Zobrazeno 1 - 10
of 94
pro vyhledávání: '"D. Lübbert"'
Autor:
D. Lübbert, Tilo Baumbach, Lukas Helfen, T. dos Santos Rolo, Feng Xu, Patrik Vagovic, Danielle Pelliccia, Alexey Ershov, Peter Modregger
Publikováno v:
Materials Testing. 51:642-651
Kurzfassung Mikrotomographie erlaubt die hochauflösende Abbildung verdeckter Mikrostrukturen und den Nachweis von Mikrorissen und Mikroporen in vielfältigen Bereichen, darunter die Untersuchung von mikroporösen Materialien und Fasernetzwerken, der
Publikováno v:
Crystal Research and Technology. 44:534-538
Spatially resolved rocking curve imaging has been used to analyze laterally overgrown silicon layers grown by liquid phase epitaxy. We were able to study both the overgrown layer as well as the strain fluctuations of the Si substrate underneath by me
Publikováno v:
physica status solidi (a). 204:2746-2752
The spatial resolution of an imaging system is most often experimentally determined by using model objects and idealized imaging conditions. This traditional approach does not properly take into account the influence of noise and the dependence of co
Publikováno v:
physica status solidi (a). 204:2509-2513
The XTOP conference, held every other year at a different location in Europe, is one of the central scientific platforms for methods and instrumentation in synchrotron-based high resolution X-ray diffraction methods, phase contrast imaging and microt
Autor:
J. Arthur, D. Lübbert, I. Kegel, Michael Sztucki, T. H. Metzger, J. R. Patel, A. Tilke, Jean-Luc Rouvière
Publikováno v:
Journal of Applied Physics. 92:3694-3703
We demonstrate the application of surface sensitive diffuse x-ray scattering under the condition of grazing incidence and exit angles to investigate growth and dissolution of near-surface defects after boron implantation in silicon(001) and annealing
Publikováno v:
Journal of Applied Physics. 87:3744-3758
The surface shape and the spatial distribution of strain in GaInAs/InP multilayer gratings is experimentally determined by combining high-resolution x-ray diffraction and grazing-incidence diffraction. Dramatic deformations of the diffraction pattern
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 160:521-527
We present a method and an equipment for performing μm-resolved X-ray diffraction area maps, and apply it to wafer defect analysis and industrial wafer quality inspection. The method determines simultaneously the macroscopic warpage, the mesoscopic
Publikováno v:
Materials Science and Engineering: B. :392-396
We study the lattice strain relaxation in pseudomorphic surface gratings using high resolution X-ray diffraction (XRD), grazing incidence diffraction and elasticity theory. By means of grazing incidence diffraction we determine the grating shape and
Publikováno v:
Acta Physica Polonica A. 116:976-978
X-ray rocking curve imaging technique was used to study crystallographic perfection of laterally overgrown epitaxial structures. We focus on rocking curve imaging studies of Si-doped GaAs and GaSb laterally overgrown layers grown by liquid phase epit
Publikováno v:
Europhysics Letters (EPL). 46:479-485
We investigate the strain evolution in low strained gratings before and after embedding in the substrate material by high-resolution grazing incidence X-ray diffraction and elasticity theory. For the experiments, we use a non-coplanar multiple crysta