Zobrazeno 1 - 2
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pro vyhledávání: '"D. Kho Ching Tien"'
Autor:
Koo Sang Sool, D. Kho Ching Tien
Publikováno v:
2008 IEEE International Conference on Semiconductor Electronics.
The work presented here shows a change in migration behaviour of a transferred AlCu metallization system. Different failure mechanisms in metallization are known. Migration effects like electro-, thermo- and stress migration are the main failure mech
Publikováno v:
2008 IEEE International Conference on Semiconductor Electronics.
The work presented here shows a series of engineering runs to improve the AC HCI lifetime for a 0.60 mum NMOS. The conventional method of increasing NLDD energy and reducing NLDD dose did not achieve significant improvement. The study concludes that