Zobrazeno 1 - 2
of 2
pro vyhledávání: '"D. A. Wickeraad"'
Autor:
D. A. Wickeraad, Joo Yong Sim, Beth L. Pruitt, C. L. Roozeboom, Matthew A. Hopcroft, Peter G. Hartwell, W. S. Smith
Publikováno v:
Journal of Microelectromechanical Systems. 22:779-793
We present the design, microfabrication, and characterization of ten sensors on one silicon die. We demonstrate simultaneous monitoring of multiple environmental parameters, including temperature, humidity, light intensity, pressure, wind speed, wind
Autor:
R. S. Williams, Joo Yong Sim, B. Dura, D. A. Wickeraad, Matthew A. Hopcroft, C. L. Roozeboom, Peter G. Hartwell, W. S. Smith, Beth L. Pruitt
Publikováno v:
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS).
We present multi-functional integrated sensors for the environment (MFISEs) combining ten sensor functions on a single silicon die. The purpose of the MFISEs chip is to monitor important environmental parameters such as temperature, humidity and air