Zobrazeno 1 - 1
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pro vyhledávání: '"D. A. Saladukha"'
Publikováno v:
Pribory i Metody Izmerenij, Vol 0, Iss 1, Pp 37-40 (2015)
Various modifications of complex pulsed laser and magnetron deposition thin-film structures unit are presented. They include joint and separate variants of layer deposition. Unit realizes the plasma parameters control and enhances the possibility of
Externí odkaz:
https://doaj.org/article/031c124fd2514e8eae993251fcee69db