Zobrazeno 1 - 10
of 26
pro vyhledávání: '"D. A. Pryakhin"'
Autor:
V. V. Rogov, Vladimir I. Shashkin, Alexander Yu. Klimov, Evgeny A. Vopilkin, D. A. Pryakhin, Irina Yu Shuleshova, Sergey A. Gusev, Evgeny V. Skorohodov
Publikováno v:
IEEE Sensors Journal. 14:1831-1835
A possibility of fabrication of a microelectromechanical tunneling sensor without a feedback loop is demonstrated. The tunneling gap of less than 10 nm shows a long-term stability at room conditions. The sensor can be used for construction of an acce
Autor:
E.D. Chhalo, D. V. Kozlov, R.Kh. Zhukavin, Pavel A. Yunin, Yu. N. Drozdov, A. V. Novikov, N. A. Bekin, V.N. Shastin, M. N. Drozdov, D. A. Pryakhin, D. N. Lobanov
Publikováno v:
Physica E: Low-dimensional Systems and Nanostructures. 57:42-46
A study of vertical transport in δ -doped SiGe/Si heterostructures is presented. An asymmetrical triple barrier structure was grown with a δ -layer of boron impurity in the center of a narrow quantum well. The growth procedure was followed by conve
Autor:
D. A. Pryakhin, Petr G. Sennikov, Leonid Mochalov, Yu. N. Drozdov, Pavel Bulkin, L. V. Gavrilenko, P. Roca i Cabarrocas, Pavel A. Yunin, Boris A. Andreev
Publikováno v:
Thin Solid Films. 552:46-49
Our objective is to study Raman spectra from 74Ge isotope enriched nc-Ge/amorphous-Ge structures, given the expected minimal influence of the matrix on the nanocrystalline phase in the structures with a modified isotope composition. We also assess th
Autor:
A. U. Lukyanov, A. D. Tertyshnik, P. V. Volkov, A. V. Goryunov, D. A. Pryakhin, V. I. Shashkin
Publikováno v:
Russian Microelectronics. 40:309-315
Using weakly coherent tandem interferometry, the possibility of simultaneous temperature and film thickness measurements in plasmochemical etching processes of silicon on insulator structure is demonstrated. It is shown that changes of the structure
Autor:
Yu. N. Drozdov, Boris A. Andreev, M. N. Drozdov, D. A. Pryakhin, Hans-Joachim Pohl, Petr G. Sennikov, A. S. Kuznetsov, Nickolay Abrosimov, A. V. Murel, Helge Riemann, V. I. Shashkin
Publikováno v:
Crystal Research and Technology. 45:899-908
The process of plasma chemical deposition of silicon from inductively coupled plasma of the mixture of high-purity SiF4 and H2 sustained by RF discharge at 13.56 MHz in amount sufficient for subsequent growth of crystal by Czochralski method was inve
Autor:
M. N. Drozdov, L. V. Gavrilenko, Yu. N. Drozdov, D. A. Pryakhin, Boris A. Andreev, Petr G. Sennikov, Hans-Joachim Pohl, V. I. Shashkin
Publikováno v:
Crystal Research and Technology. 45:983-987
The process of plasma chemical deposition of silicon was investigated from its tetrafluoride containing 99.99% of 28Si isotope in the form of thin layer of nano-crystalline silicon on silicon substrate and of thick layer of polycrystalline silicon on
Autor:
Sergey Golubev, Vladimir Shashkin, M. N. Drozdov, Hans-Joachim Pohl, D. A. Pryakhin, Petr G. Sennikov, Boris A. Andreev
Publikováno v:
ECS Transactions. 25:229-233
The results on production of films and bulk silicon samples of different isotopic composition by PECVD method are reported. The samples are investigated by the methods of X-ray diffraction, Raman scattering, secondary-ion mass spectrometry, IR spectr
Autor:
D. A. Pryakhin, Sergey Golubev, A. S. Kuznetsov, V. I. Shashkin, Boris A. Andreev, M. N. Drozdov, Hans-Joachim Pohl, Yu. N. Drozdov, Petr G. Sennikov
Publikováno v:
Semiconductors. 43:968-972
The data on fabrication of silicon layers on various substrates by plasma enhanced chemical vapor deposition from the (silicon tetrafluoride)-hydrogen system are reported. The emission spectra of the plasma in the system are recorded. The samples wer
Autor:
N. V. Vostokov, O. I. Khrykin, M. N. Drozdov, D. A. Pryakhin, A. V. Murel, Yu. N. Drozdov, V. I. Shashkin, V. M. Danil’tsev
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 2:514-517
The effect of B dopants on the properties of InAs quantum dots is studied experimentally. It is shown that the incorporation of B atoms decreases the integral amount of InAs that is needed to form islands according to the Stransky-Krastanov mechanism
Autor:
O. I. Khrykin, A. V. Goryunov, D. A. Pryakhin, A. Yu. Luk’yanov, A. D. Tertyshnik, V. M. Danil’tsev, P. V. Volkov, V. I. Shashkin
Publikováno v:
Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 2:587-591
The possibility of applying low-coherent tandem interferometry to optical monitoring of the temperature of a semiconductor substrate and the thickness of a deposited layer in metal-organic vapor-phase epitaxy (MOVPE) is demonstrated for the first tim