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pro vyhledávání: '"D. A. La Van"'
Autor:
Jeremy A. Walraven, M.P. de Boer, Lloyd W. Irwin, D. A. La Van, Jeffry J. Sniegowski, S. S. Mani, Danelle M. Tanner, James G. Fleming
Publikováno v:
MRS Proceedings. 605
Two major problems associated with Si-based MEMS (MicroElectroMechanical Systems) devices are stiction and wear. Surface modifications are needed to reduce both adhesion and friction in micromechanical structures to solve these problems. In this pape
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3afcdb8246cb8ee369e285c7494de862
https://doi.org/10.1557/proc-605-135
https://doi.org/10.1557/proc-605-135
