The 2022 Plasma Roadmap: low temperature plasma science and technology

Autor: I Adamovich, S Agarwal, E Ahedo, L L Alves, S Baalrud, N Babaeva, A Bogaerts, A Bourdon, P J Bruggeman, C Canal, E H Choi, S Coulombe, Z Donkó, D B Graves, S Hamaguchi, D Hegemann, M Hori, H-H Kim, G M W Kroesen, M J Kushner, A Laricchiuta, X Li, T E Magin, S Mededovic Thagard, V Miller, A B Murphy, G S Oehrlein, N Puac, R M Sankaran, S Samukawa, M Shiratani, M Šimek, N Tarasenko, K Terashima, E Thomas Jr, J Trieschmann, S Tsikata, M M Turner, I J van der Walt, M C M van de Sanden, T von Woedtke

Publikováno v: Journal of Physics D: Applied Physics, 55(37):373001. Institute of Physics
Journal of Physics D: Applied Physics, 55, 373001
Journal of physics: D: applied physics
e-Archivo. Repositorio Institucional de la Universidad Carlos III de Madrid
instname
Journal of Physics D: Applied Physics

Documento escrito por un elevado número de autores/as, solo se referencia el/la que aparece en primer lugar y los/as autores/as pertenecientes a la UC3M. The 2022 Roadmap is the next update in the series of Plasma Roadmaps published by Journal of Ph

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1dfd5070a5f1f5999500e993944ce9a7
https://hdl.handle.net/2117/376648

Wafer heating mechanisms in a molecular gas, inductively coupled plasma: in situ, real time wafer surface measurements and three-dimensional thermal modeling

Autor: D. B. Graves, M. J. Titus

Publikováno v: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 26:1154-1160

The authors report measurements and modeling of wafer heating mechanisms in an Ar∕O2 inductively coupled plasma (ICP). The authors employed a commercially available on-wafer sensor system (PlasmaTemp™ developed by KLA-Tencor) consisting of an on-

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::9c13ffad74114ff27aa8b2657c397e89
https://doi.org/10.1116/1.2953713

Analysis of cloud storage providers for enterprise readiness based on usage patterns and local resources

Autor: A.W. Troescher, A. J. Livingston, A. A. Wendel, D. C. Graves

Publikováno v: SoutheastCon 2015.

Internet based storage providers “Cloud Storage” are growing in popularity at an incredible rate. Online file sharing and backup has become so ubiquitous in the consumer marketplace that many systems administrators are beginning to consider it a

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::20988a1bdd529afd57dacc40b411b642
https://doi.org/10.1109/secon.2015.7133040

Effects of plasma conditions on the shapes of features etched in Cl2 and HBr plasmas. I. Bulk crystalline silicon etching

Autor: M. V. Malyshev, M. Cerullo, A. Kornblit, M. A. Vyvoda, Jaesik Lee, D. B. Graves, H. Lee, Vincent M. Donnelly, F. P. Klemens

Publikováno v: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 16:3247-3258

We have studied the effects of source and bias powers, pressure, and feed gas composition on the shapes of SiO2-masked crystalline silicon features etched in a transformer-coupled high density plasma system. Higher etching rates were obtained at high

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::0ae6ff2ab9613e6f76f80317e04ba147
https://doi.org/10.1116/1.581530

Antibody to Mac-1 or monocyte chemoattractant protein-1 inhibits monocyte recruitment and promotes tumor growth

Autor: L Zhang, T Yoshimura, D T Graves

Publikováno v: The Journal of Immunology. 158:4855-4861

Human tumors are frequently infiltrated by numerous monocytes/macrophages, which can be found within the tumor mass (intratumoral) or surrounding the tumor (peritumoral). The functional role that these monocytes/macrophages play in tumor growth is co

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::06fb4f56f49474f3b8174da27385d404
https://doi.org/10.4049/jimmunol.158.10.4855